SAW氢气传感器频率特性分析  

Frequency Characteristic Analysis of SAW Hydrogen Sensor

作　　者：吴礼峰[1] 殷晨波[1] 朱亚军[1] 杨柳[1] 唐光大[1] 

机构地区：[1]南京工业大学车辆与工程机械研究所,江苏南京211816

出　　处：《仪表技术与传感器》2015年第3期1-2,6,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金资助项目(50875122)

摘　　要：基于ANSYS13.0建立了声表面波(SAW)传感器的三维有限元模型,选择金属钯膜作为传感器敏感薄膜,选用128°YX铌酸锂作为基底材料,输入和输出叉指电极(IDT)耦合在基底表面。给输入IDT施加单位阶跃信号,并对所得到的时域响应数据进行傅里叶变换得到传感器的中心频率和插入损耗。将仿真所得频率特性与实验结果进行对比,得到了可以降低插入损耗、提高传感器性能的方法。A three-dimensional finite element model of surface acoustic wave（ SAW） sensor was developed based on ANSYS13. 0. The sensor consisted of 128°YX-lithium niobate substrate with input and output interdigital electrodes（ IDT） coupled on the surface,and palladium（ Pd） film was selected as the sensitive film. A unit step signal was applied on the input IDT and the result of time-domain response date was transformed using the Fourier Transform,from which the center frequency and insertion loss were obtained. The method of lowering the insertion loss and improving the performance of the sensor was obtained by comparing the frequency characteristics of the simulation results with the experimental results.

关 键 词：声表面波(SAW) 中心频率 插入损耗 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]