铍铜倾斜仪敏感头研制及其线性软件补偿  

Production of Beryllium Copper Sensitive Head for Inclinometer and Linearity Software Compensation

作　　者：王宏伟[1] 

机构地区：[1]北京信息科技大学理学院,北京100192

出　　处：《仪表技术与传感器》2015年第9期8-10,共3页Instrument Technique and Sensor

基　　金：国家自然科学基金项目(61471047);北京市教育委员会科技发展计划项目(KM2014121232017)

摘　　要：倾斜仪是测量倾斜角度的仪器,利用铍青铜材料优良的弹性性能加工振动元件,制作"三明治"式差动电容检测结构的倾斜仪敏感头,分析了敏感头的力学特性,给出了被测倾角和铍铜元件偏角的关系。对敏感头进行测试,利用单片机软件编程方法对敏感头进行了非线性补偿,提高了敏感头的输出线性度。Inclinometer is an instrument for measuring inclination angle,by excellent elasticity properties of beryllium bronze,it was used for making vibration of elastic element for sensitive head whose structure is ＂ sandwich＂ differential capacitance.The mechanical characteristics of sensitive head was analyzed,and the relationship between offset angle of beryllium copper element and measured tilt angle was given.The sensitive head was tested and MCU software programming method was used to compensate output linearity.The performance of the sensitive head is improved after compensation.

关 键 词：铍青铜 倾斜仪 敏感头 差动电容 软件补偿 线性度 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]