基于厚膜工艺的微型FAIMS生化气体传感器设计  

Design of Micro FAIMS Biochemical Gas Sensor Based on Thick Film Technology

作　　者：王涛龙 梁庭[1] 高利聪[1] 张瑞[1] 王心心[1] 刘雨涛[1] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室电子测试技术国防科技重点实验室,山西太原030051

出　　处：《仪表技术与传感器》2015年第12期19-21,25,共4页Instrument Technique and Sensor

基　　金：国家杰出青年科学基金资助项目(51425505);国家自然科学基金面上项目(61471324)

摘　　要：据高场非对称波形离子迁移谱(high-field asymmetric waveform ion mobility spectrometry,FAIMS)原理,设计了一种微型生化气体传感器。在大气压环境下,采用波长116.5 nm、电离能为10.6 e V真空紫外灯离子源对样品进行电离。迁移管的制作采用厚膜工艺,将迁移区和检测区集成到了陶瓷芯片上,迁移区由上下两块平板电极构成,尺寸为20 mm×10 mm×0.45 mm;检测区尺寸为8 mm×10 mm×0.45 mm。搭建了相应的FAIMS外围检测平台,以丙酮和甲苯为样品进行实验,通过高场非对称波形离子迁移谱技术进行传感器的性能验证实验,实验得到了它们的FIAMS谱图,表明所设计的基于FAIMS原理的气体传感器可以实现离子分离和过滤功能。A novel biochemical gas sensor was designed based on FAIMS（ high-field asymmetric waveform ion mobility spectrometry） theory. The sample ions were created at ambient pressure by UV（ Ultraviolet） lamp ion source with 116. 5 nm wave length and photon discharge of 10. 6 e V in power in atmospheric environment. Thick film technology was used to make the migration tube. Migration area and detection area were integrated into one ceramic chip. Both of them were composed of two planar electrodes with the size of 20 mm × 10 mm × 0. 45 mm and 8 mm × 10 mm × 0. 45 mm. A platform was created for test,acetone and toluene were adopted as the experiment sample and FAIMS technology was used to test the performance of gas sensor. Experimental results show that ions can be separated and filtrated by the gas sensor based on FAIMS theory.

关 键 词：高场不对称波形离子迁移谱 气体传感器 厚膜工艺 迁移管 

分 类 号：TN23[电子电信—物理电子学]