退火温度对溶胶-凝胶法制备氧化锆薄膜性能影响的研究  

Study on Effect of Annealing Temperature on Zirconia Thin Films Prepared by Sol-gel Method

作　　者：刘莹[1] 章德发[1] 殷艳飞[1] 刘小龙[1] 王军[1] 

机构地区：[1]南昌大学机电工程学院,江西南昌330031

出　　处：《热加工工艺》2015年第24期160-164,共5页Hot Working Technology

基　　金：国家自然科学基金资助项目(51165031)

摘　　要：采用溶胶-凝胶法,在316L不锈钢基底上以5 cm/min的提拉速度制备氧化锆(ZrO_2)薄膜。用XRD分析了不同退火温度下制备的氧化锆干凝胶粉末的物相结构;采用扫描电镜观察了薄膜表面的显微结构;对比了不同退火温度对薄膜亲/疏水性能的影响;通过计算薄膜的表面能及其与血液组分的界面张力,分析了退火温度对氧化锆薄膜血液相容性的影响;测试了试样的动电位极化曲线并分析其耐腐蚀性能。结果表明:采用500℃退火可以得到晶粒颗粒小、表面平整的四方相结构氧化锆薄膜,其与血液相容性最好,耐腐蚀性较强。By sol-gel method, zirconia （ZrO2） thin films were prepared on 316L stainless steel with lifting speed at 5 cm/min. The phase structure ofzirconia gelatum powder, which was prepared at different annealing temperature, was characterized by XRD. The surface morphology of zirconia thin films was obsrved by SEM. The influences of different annealing temperature on film hydrophilic and hydrophobic properties were compared. Based on calculating the surface energy of zirconia thin films and the interface tension between thin films and blood component, the influences of the annealing temperature on hemocompatibility of zirconia film were analyzed. The potentiodynamic polarization curves of samples were tested and their corrosion resistance was analyzed. The results show that, the zirconia thin films annealed at 500℃ have tetragonal stracture of small grain particles and smooth surface, and it has favorable hemoeompatibility and corrosion resistance.

关 键 词：氧化锆薄膜 316L不锈钢 溶胶-凝胶法 血液相容性 耐腐蚀性 

分 类 号：TG174[金属学及工艺—金属表面处理]