飞秒激光制备亚波长周期光栅及其光学特性  

Emtosecond Laser Fabricating Sub-wavelength Periodical Grating Structures and Its Optical Properties

作　　者：刘嵩[1] 刘世炳[1] 董祥明[1] 宋海英[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100124

出　　处：《北京工业大学学报》2016年第1期68-73,共6页Journal of Beijing University of Technology

基　　金：国家自然科学基金资助项目(51275012)

摘　　要：使用中心波长800 nm、重复频率1 k Hz的飞秒激光,在金属钨表面斜入射下制备了亚波长周期光栅结构,在入射角为0°~80°时,光栅结构的周期为349~620 nm.利用表面等离子体激元的理论分析了在钨表面制备光栅结构的过程,实验结果与理论符合较好.利用严格耦合波分析方法计算了实验中得到的光栅结构的反射光谱,其吸收增强波长大小与光栅结构周期相近.研究结果表明：利用飞秒激光可以在金属表面直接诱导周期可控的光栅结构,此光栅结构具有一定的应用前景.Sub-wavelength periodical grating structures on tungsten surface was fabricated by femtosecond laser whose central wavelength is 800 nm and the repetition rate is 1 k Hz. The period of the structures was349-620 nm when the laser incidence angle was 0°-80°. The formation of grating structures on tungsten was discussed by surface plasmon polaritons theory and the result of experiment showed a good agreement. The reflectance spectra of these grating structure was simulated by rigorous coupled wave analysis method. The enhanced absorbtion peak was closed to the grating period. This study gives a prospect of applications by femtosecond laser fabricating grating structures.

关 键 词：飞秒激光 光栅结构 表面等离子体 

分 类 号：TN249[电子电信—物理电子学]