检索规则说明:AND代表“并且”;OR代表“或者”;NOT代表“不包含”;(注意必须大写,运算符两边需空一格)
检 索 范 例 :范例一: (K=图书馆学 OR K=情报学) AND A=范并思 范例二:J=计算机应用与软件 AND (U=C++ OR U=Basic) NOT M=Visual
作 者:高阳[1] 李永红[1,2] 岳凤英[3] 孙玉环[1,2] 刘期兵 魏坦勇
机构地区:[1]中北大学仪器与电子学院,太原030051 [2]山西科泰微技术有限公司,太原030051 [3]中北大学计算机与控制学院,太原030051
出 处:《传感技术学报》2015年第12期1785-1788,共4页Chinese Journal of Sensors and Actuators
基 金:山西省青年基金(2012021013-6)
摘 要:介绍了一种基于弹性膜片结构的拉力传感器,敏感元件薄膜电阻应变栅采用离子束溅射、光刻技术与弹性体结合成一体。文中给出了传感器的基本结构及零点补偿和信号转接电路,介绍了薄膜电桥的制备过程,并对弹性体进行了仿真与分析。实验结果显示,该传感器在满量程范围内能满足设计要求,其额定载荷为850 N,灵敏度优于0.013 77 m V/N。且其安全过载系数约为6.62,为同类拉力传感器的2~3倍。对传感器的标定表明,该传感器的综合误差不大于额定输出的0.013%。A tension sensor based on an elastic diaphragm is introduced. The sensitive element is thin film resistiveof strain gate,which is combined into one body with elastomer by using technique of ion beam sputtering and photo-lithography. The basic structure of the sensor and the circuit of zero compensation and signal switching is intro-duced in this paper. The simulation and analysis of the elastomer is also carried out. The experimental results showthat the sensor can meet the design requirements in full scale. The load of the sensor is 850 N. The sensitivity is bet-ter than 0.013 77 m V/N. The safety overload coefficient is about 6.62,which is 2-3 times that of similar tension sen-sor. The calibration of the sensor indicates that comprehensive error of the sensor is not greater than 0.013% of therated output.
分 类 号:TP212[自动化与计算机技术—检测技术与自动化装置]
正在载入数据...
正在载入数据...
正在载入数据...
正在载入数据...
正在载入数据...
正在载入数据...
正在载入数据...
正在链接到云南高校图书馆文献保障联盟下载...
云南高校图书馆联盟文献共享服务平台 版权所有©
您的IP:216.73.216.249