多弧离子镀制备TiN涂层的高温氧化行为分析  

Investigation on High Temperature Oxidation Behavior of TiN Coating by Multi-Arc Ion Plating

作　　者：陈燕鸣[1] 万强[1] 蔡耀[1] 罗畅[1] 刘辉东[1] 杨兵[1] 

机构地区：[1]武汉大学动力与机械学院,武汉437072

出　　处：《中南民族大学学报（自然科学版）》2015年第4期68-71,共4页Journal of South-Central University for Nationalities：Natural Science Edition

基　　金：国家自然科学基金资助项目(11275141);中央高校基本科研业务费专项资金资助项目(2014208020202)

摘　　要：利用多弧离子镀技术沉积TiN涂层,并在空气中对该涂层进行了500~680℃范围内的氧化实验.通过SEM与XRD技术分析了实验制备的TiN涂层及其氧化产物的结构形貌,结果表明：多弧离子镀技术所沉积的TiN涂层表面较为粗糙,存在大量颗粒与凹坑;TiN涂层在空气中的氧化产物为TiO2,550℃时存在较轻程度的氧化行为,随着温度的升高,氧化作用加剧,在温度为650℃时TiN涂层氧化程度加深,但剥落并不明显,当温度超过650℃达到680℃,TiN涂层完全氧化,部分区域因为应力作用而发生严重剥落.Ti N coatings were deposited by multi-arc ion plating and the oxidation tests were conducted at 500-680℃. The microstructure of the coatings before and after oxidizing were characterized by scanning electric microscopy（ SEM） and Xray diffraction（ XRD）. The results suggested that the surface of Ti N coatings deposited by multi-arc ion plating were rough with many particles and pores. Ti N coating started to oxidize slightly at 550℃ and the oxidize product is Ti O2. The oxidation increased significantly with the increase of temperature. Although there had deepened oxidation at 650℃,the flake phenomenon was not very obvious. At 680℃,Ti N coating was totally oxidized and peeled off in some area due to the mighty induced stress.

关 键 词：TIN 多弧离子镀 氧化行为 

分 类 号：TG174.4[金属学及工艺—金属表面处理]