基于时序驱动的静态光场式时栅传感方法研究（英文）  

Study on the time-grating sensor method of the static light field type based on timing-driven

作　　者：付敏[1] 张兴红[1] 

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《机床与液压》2015年第24期75-79,共5页Machine Tool & Hydraulics

基　　金：supported by National Natural Science Foundation of China (No.51127001,51475063);National Natural Science Foundation of Chongqing (No.CST2012JJA40062)

摘　　要：提出了一种用时序驱动光敏元构成匀速扫描坐标系的方法,实现了将被测物体空间位移的测量转换为对时间差的测量。根据时栅相对运动双坐标系的转换原理,将线阵CCD的光敏元视为匀速扫描坐标系,两个空间上并排,时序上互相错开的线阵CCD为静止坐标系,则同一被测对象在两个CCD上输出电信号的时间差的变化量与扫描速度的乘积,即为所测位移的大小,并可以判断位移的方向。用雷尼绍激光干涉仪对所研制的CCD时栅传感器进行校准,在有效测量范围(600.05 mm)内,经过修正后的测量误差控制在±2μm以内,实现了在光学领域应用时间测量空间的思想。A uniform scan coordinate system by using photosensitive element of timing driven is proposed to convert the displacement detection of the object into measured time difference. According to the conversion principle of relative motion coordinate systems of time grating,if the photosensitive element of linear CCD is regarded as a uniform scanning coordinate system and the spatial side by side and timing of mutually staggered on the two linear CCD is regarded as a stationary coordinate system,size and direction of the relative displacement of the object would be made by multiplying time difference variation and scanning speed after the time difference variation of the output electric signal on the different CCD for the same object are measured. With the calibration of the Renishaw laser interferometer for the developed linear CCD time grating sensor,the measurement errors could be controlled within ± 2 μm after error correction is made for the effective measurement range of 600. 05 mm. This realizes the idea of time measurement space in the field of optical.

关 键 词：DISPLACEMENT measurement  Time GRATING DISPLACEMENT sensor  CCD DISPLACEMENT sensor  Timing-driven 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]