原子力显微镜形貌像的典型失真和伪迹  

Typical Distortion and Artifact of Morphology Measure with Atomic Force Microscopy

作　　者：李鹏[1] 王朋伟[1] 刘竞艳[1] 苗壮[1] 

机构地区：[1]西北有色金属研究院材料分析中心,西安710016

出　　处：《西安文理学院学报（自然科学版）》2016年第1期59-63,共5页Journal of Xi’an University(Natural Science Edition)

基　　金：西安市西部材料创新基金项目(XBCL-1-05)

摘　　要：简要分析原子力显微镜测量形貌像过程中由于针尖状态、样品状态和环境影响所造成的典型的失真和伪迹.其中针尖状态因素包括针尖钝化、针尖污染、针尖残缺等;样品状态包括弓形轨迹和边界效应;环境影响包括环境振动和电子噪声两个因素.对涉及的某些失真和伪迹,提供和讨论了一些相应的避免方案和图像处理办法以供参考.In this paper, the typical distortion and artifact caused by the probe tip, sample status and environment during the process of morphology measured with atomic force microscopy were analyzed briefly. Among them, factors of the tip state include tip passivation, tip contamination and tip deformity, etc. The sample state includes the bow trajectory and the boundary effect, and the environmental impact includes two factors of environmental vibration and electronic noise. For some distortion and artifact involved, some of the corresponding avoidance schemes and image processing methods were provided and discussed for reference.

关 键 词：原子力显微镜 探针 假像 形貌表征 

分 类 号：TH742[机械工程—光学工程]