溶胶凝胶法制备多孔SiO_2减反射膜结构和性能研究  

Research on Properties and Structure of Porous SiO_2 Anti-reflective Coatings by Sol-gel Method

作　　者：黄玉萍[1] 阙永生[1] 汪海风[1] 潘崇根[1] 吴春春[1] 

机构地区：[1]浙江加州国际纳米技术研究院浙江大学,浙江杭州310058

出　　处：《稀有金属材料与工程》2016年第S1期12-15,共4页Rare Metal Materials and Engineering

基　　金：浙江省教育厅项目(Y201122694);浙江省博后基金(Bsh1201017);中央高校基本科研业务专项基金(2014QN81006)

摘　　要：以TEOS(硅酸乙酯)、MTES(甲基三乙氧基硅烷)作为前驱体,MTES(甲基三乙氧基硅烷)为有机改性剂,Triton~?X-100作为模板剂,由酸催化溶胶-凝胶工艺制备多孔二氧化硅增透膜,探讨不同量的MTES对薄膜结构和性能的影响。研究发现随着MTES的增加,膜的孔径与抗冷凝性能均呈现出先增加后降低的趋势;同时,随着MTES的增加,涂层接触角逐渐增加;这表明与涂层表面的疏水性相比,涂层内部的孔结构大小与减反射涂层(ARcoatings)的抗冷凝性能相关性更大,当MTES与TEOS的摩尔比为1:2时,涂层达到最佳性能。With TEOS(tetraethoxysilane) and MTES(methyl triethoxysilane) as precursors, MTES(methyl triethoxysilane) as organic modifier, and Triton?X-100 as sacrificial template, porous silica anti-reflective(AR) coating has been fabricated by acid catalyzed sol-gel process. The effect of MTES on properties and structure of porous SiO_2 anti-reflective coatings was investigated. It has been found that both the pore diameter and condensation resistance of the coatings first increase and then decrease with the increase of MTES and that contact angle of the coatings increases with the increase of MTES. Results suggest that coating performance of condensation resistance is more related to the pore diameter of AR coatings than hydrophobicity. The coating yields the best performances when the molar ratio of MTES to TEOS is 1:2.

关 键 词：硅酸乙酯 甲基三乙氧基硅烷 多孔减反射膜 抗凝聚性能 

分 类 号：O613.72[理学—无机化学] TB383.2[理学—化学]