基于Al_2O_3封装薄膜的OLED水汽透过率测试方法及系统研究  

Test Method and System of Water Vapor Transmission Rate Based on Al_2O_3 Encapsulated Thin-film for OLEDs

作　　者：段玮[1,2] 李晟[1,2] 张浩[2] 张志林[2] 张建华[1,2] 

机构地区：[1]上海大学机电工程与自动化学院,上海200072 [2]上海大学新型显示技术及应用集成教育部重点实验室,上海200072

出　　处：《发光学报》2016年第1期88-93,共6页Chinese Journal of Luminescence

基　　金：国家重点基础研究发展计划(973计划)(2015CB655005);上海市优秀学术带头人(14XD1401800);上海市平板显示工程技术研究中心(14DZ2280900)资助项目

摘　　要：水汽透过率(WVTR)是衡量有机电致发光器件(OLED)封装薄膜性能的重要参数之一。本文研究了基于钙电学法的WVTR测试方法,设计并研制了可满足OLED水汽透过率测试精度和功能要求的测试系统,测试精度达1×10-6g·m-2·d-1,量程为10 g·m-2·d-1,可同时完成20个样品的快速、精确测量。利用本系统对采用原子层沉积技术制备的不同厚度Al2O3封装薄膜的WVTR进行了测试研究,结果表明,Al2O3薄膜具有良好的水汽阻挡性能。For encapsulated thin film of the organic light emitting devices and flexible electronic devices,water vapor transmission rate（ WVTR） is one of the most important parameters to evaluate the performance of thin film. In this paper,the method of calcium electrical test was studied. Based on this method,a new type of water vapor transmission measurement system was designed and developed,which can meet the requirement of accuracy and rapidity for WVTR testing of OLED. The results show that the precision of the system is 1 × 10^- 6g·m^- 2·d^- 1and the range is 10 g·m^- 2·d^- 1. The system can measure 20 samples rapidly and accurately at the same time. Deposited by atomic layer deposition,the WVTR of the different thickness Al2O3 thin films encapsulated layers（ TFE） were studied. The results show that Al2O3 thin film has low water vapor barrier properties.

关 键 词：有机电致发光器件 水汽透过率 钙电学测量法 多通道测试系统 薄膜封装 

分 类 号：TP274[自动化与计算机技术—检测技术与自动化装置] TN383.1[自动化与计算机技术—控制科学与工程]