低压力下复杂结构真空容器容积比的测量方法研究  

MEASURING THE VOLUME RATIOS OF COMPLICATED VACUUM VESSEL IN THE LOW PRESSURE CONDITION

作　　者：吉康[1] 成永军[1] 杨长青[1] 习振华[1] 张瑞芳[1] 张琦[1] 

机构地区：[1]兰州空间技术物理研究所,兰州730000

出　　处：《真空与低温》2016年第1期30-34,共5页Vacuum and Cryogenics

摘　　要：真空容器容积比的测量方法通常有称重法和静态膨胀法。目前,复杂结构真空容器容积比主要是在较高的压力下通过气体静态膨胀进行测量。但当膨胀压力低于10^(-2)Pa时,真空容器器壁的放气会对容积比的测量带来很大的影响。为了确保在膨胀前后气体量不改变,即减小在低压力下真空容器的放气对测量的影响,提出了利用非蒸散性吸气泵选择性抽气的特性,结合静态膨胀法利用惰性气体氩气(Ar)、氦气(He)来测量真空容器的容积比。Gravimetric method and static expansion method have been used for volume ratios of complicated vacuum vessel. The volume ratios of complicated vacuum vessel can be measured by gas static expansion method,which was most-ly developed for the precise measurement of expansion ratios in static expansion systems. At present volume ratios of com-plicated vacuum vessel were mainly measured in the high pressure. It can reduced the influence of outgassing in the cham-bers. However,measurements of the volume ratios using the gas expansion methods below 10-2 Pa are influenced by out-gassing from vacuum vessel. We have put forward using the non-evaporable getter(NEG)pumps,which pump active gas-es but have a few pumping speed for inert gases. we have made use of the inert gases Argon,Helium measuring the vol-ume ratio of complicated vacuum vessel combine with the static expansion method.

关 键 词：容积比测量 非蒸散型吸气剂泵 静态膨胀法 

分 类 号：TB771[一般工业技术—真空技术]