基于氧化铝陶瓷的无线无源高温压力传感器的设计与制备  

Design and Fabrication of Wireless and Passive High Temperature Pressure Sensor Based on Al_2O_3 Ceramic

作　　者：关洋[1] 张晓明[1,2] 

机构地区：[1]中北大学电子测试技术国防科技重点实验室 [2]中北大学仪器科学与动态测试教育部重点实验室,太原030051

出　　处：《科学技术与工程》2016年第2期203-207,共5页Science Technology and Engineering

摘　　要：设计并制备了一种基于氧化铝陶瓷的无线无源高温压力传感器。首先在常温、压力测试范围为0~0.4 MPa的设计条件下,利用ANSYS仿真软件对所设计的结构进行了力学模型的分析,得出方形氧化铝陶瓷的最大等效应力小于最大许用应力;之后从切片与冲孔、叠片与热压、高温烧结、丝网印刷与后烧等主要工艺步骤介绍了基于氧化铝陶瓷压力传感器的制备方法;最后对其进行了导通性测试。所制备的压力传感器可用于常温下的压力检测和高温下的性能研究。The pressure sensor base on high temperature co-fired ceramic is widely used to harsh environment.This paper proposed and fabricated a wireless and passive high temperature pressure sensor base on Al2O3 ceramic.Firstly,in room temperature and pressure test range from 0 to 0. 4 MPa,the mechanical model of this sensor is analyzed with Ansys simulation software,the result is the maximum equivalent stress of square Al2O3 ceramic less than maximum allowable stress. Afterwards,this paper introduces the preparation method of Al2O3 ceramic pressure sensor,the technical process main include slice and punching,lamination and thermal pressure,high-temperature sintering,screen printing and post-fire. Finally,the sensor is measured for its conductivity. This pressure sensor has a good application for pressure measurement in room temperature for and performance research in high temperature.

关 键 词：氧化铝陶瓷 压力传感器 ANSYS仿真 工艺制备 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]