An Array Consisting of 10 High-Speed Side-Illuminated Evanescently Coupled Waveguide Photodetectors Each with a Bandwidth of 20 GHz  

作　　者：吕倩倩 叶焓 尹冬冬 杨晓红 韩勤 

机构地区：[1]State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences

出　　处：《Chinese Physics Letters》2015年第12期171-173,共3页中国物理快报（英文版）

基　　金：Supported by the High-Tech Research and Development Program of China under Grant Nos 2013AA031401,2015AA016902 and 2015AA016904;the National Natural Science Foundation of China under Grant Nos 61176053,61274069 and 61435002;the National Basic Research Program of China under Grant No 2012CB933503

摘　　要：We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors （ECPDs）. The 10 ECPDs exhibit a uniform 3dB bandwidth of 20 GHz and low dark current of about i nA at 2 V reverse bias. The 10 ECPDs also exhibit uniform photo-responsivity of about 0.23A/W with an active region of 5 × 25μmS. The photodetector array has a total bandwidth of more than 200 GHz and can be integrated with other optoelectronic devices.We design and fabricate a parallel system with 10 high speed side-illuminated evanescently coupled waveguide photodetectors （ECPDs）. The 10 ECPDs exhibit a uniform 3dB bandwidth of 20 GHz and low dark current of about i nA at 2 V reverse bias. The 10 ECPDs also exhibit uniform photo-responsivity of about 0.23A/W with an active region of 5 × 25μmS. The photodetector array has a total bandwidth of more than 200 GHz and can be integrated with other optoelectronic devices.

关 键 词：PD An Array Consisting of 10 High-Speed Side-Illuminated Evanescently Coupled Waveguide Photodetectors Each with a Bandwidth of 20 GHz length 

分 类 号：TN252[电子电信—物理电子学]