亚波长金属块阵列的太赫兹传感芯片  

Terahertz Sensing Chip of Sub-wavelength Metallic Arrays

作　　者：王思江[1] 毛洪艳[1] 夏良平[1] 杨忠波[1] 魏东山[1] 崔洪亮[1] 杜春雷[1] 

机构地区：[1]中国科学院重庆绿色智能技术研究院,跨尺度制造技术重庆市重点实验室,重庆400714

出　　处：《光电工程》2016年第1期82-87,共6页Opto-Electronic Engineering

基　　金：国家973项目(2015CB755401)资助;国家自然科学基金项目(21407145)资助;重庆市基础前沿项目(cstc2013jcyjC00001)资助

摘　　要：光波波段的生化传感器件已很常见且可实现单分子探测,但由于光波波长在纳米量级,制作出的器件的结构尺寸小、加工难度大、传感重复性较差。因此,本文提出一种亚波长金属块阵列结构的太赫兹(Terahertz,THz)传感芯片,在理论上基于法布里-珀罗(FP)共振建立了其传感模型,结合有限元方法分析了亚波长金属结构局域表面等离子体共振对其传感灵敏度的影响规律。然后采用正交光刻工艺制作出了结构均一的传感芯片,传感实验表明,该芯片对0.025 mol/L的D(+)-葡萄糖水溶液可产生53 GHz的频移量,传感灵敏度高,有望应用于高灵敏的太赫兹生物传感。Recently, light wave band biochemical sensors of single molecule detection are common to be seen. However, because of the light wave＇s nano-scale length, the devices of small size are difficult to process and have poor sensing repeatability. Therefore, we proposed a terahertz（Terahertz, THz） sensor chip constituted of simple sub-wavelength metal block arrays. In theory, we established its sensing model based on Fabry-Perot（FP） resonance, combined with the analysis of the influence of the localized surface plasmon resonance of sub-wavelength metal structure of sensitivity in the Finite Element Method（FEM）. Based on this, a large area and homogeneous structure was fabricated with the orthogonal lithography. The experimental result indicates that the resonance frequency shift 53 GHz for 0.025 mol/L D（＋）-Glucose solution, which possess high sensitivity. Our works can provide theoretical guidance for the design of high sensitive terahertz sensor.

关 键 词：亚波长金属结构 正交光刻 太赫兹 传感 

分 类 号：O433.1[机械工程—光学工程] O433.4[理学—光学]