High precision intelligent flexible grasping front-end with CMOS interface for robots application  

作　　者：Xiaohui HU Xu ZHANG Ming LIU Yuanfang CHEN Peng LI Jialin LIU Zhaolin YAO Weihua PEI Chun ZHANG Hongda CHEN 

机构地区：[1]Institute of Semiconductors, Academy of Sciences [2]Institute of Microelectronics, Tsinghua University

出　　处：《Science China(Information Sciences)》2016年第3期172-182,共11页中国科学（信息科学）（英文版）

基　　金：supported by National High Technology Research and Development Program of China(863)(Grant Nos.2012AA030308;2013AA032204);National Basic Research Program of China(Grant No.2011CB933203);National Natural Science Foundation of China(Grant Nos.81300803;61327809;61474107;61372060;61335010;61275200;61178051);Grant for Capital Clinical Application Research with Characteristics(Grant No.Z141107002;514061);Chinese Academy of Sciences Focus Fund(Grant No.KJZD-EW-L11-01)

摘　　要：This paper presents a high-precision intelligent flexible robot grasping front-end with an integrated capacitive tactile sensor array and a conditioning chip. The capacitive tactile sensor is the primary part of the front-end, it determines the overall performance. The micro-needle array sandwich structure in the tactile sensor increases the repeatability and stability, and ensures the sensitivity. The assembled sensor exhibits a saturation at 10.53 N （421 kPa） with a sensitivity of 1.9%/kPa. Furthermore, a conditioning chip is utilized in a custom readout interface to achieve better performance by reducing signal attenuation, and to increase the compatibility of the front-end. The chip is optimized for the parasitic shunt capacitance in the capacitor array. A dual bidirectional charge-discharge conversion method and a two-port detection method are matched to achieve the goal of reducing the shunting influence, and attenuating the offset voltage or the noise input effects. A prototype of the interface has been fabricated using 180-nm CMOS technology. Sensor with the value of 0.5 pF shunted by capacitors of 47 pF has been detected with an error of 1% within 100 μs.This paper presents a high-precision intelligent flexible robot grasping front-end with an integrated capacitive tactile sensor array and a conditioning chip. The capacitive tactile sensor is the primary part of the front-end, it determines the overall performance. The micro-needle array sandwich structure in the tactile sensor increases the repeatability and stability, and ensures the sensitivity. The assembled sensor exhibits a saturation at 10.53 N （421 kPa） with a sensitivity of 1.9%/kPa. Furthermore, a conditioning chip is utilized in a custom readout interface to achieve better performance by reducing signal attenuation, and to increase the compatibility of the front-end. The chip is optimized for the parasitic shunt capacitance in the capacitor array. A dual bidirectional charge-discharge conversion method and a two-port detection method are matched to achieve the goal of reducing the shunting influence, and attenuating the offset voltage or the noise input effects. A prototype of the interface has been fabricated using 180-nm CMOS technology. Sensor with the value of 0.5 pF shunted by capacitors of 47 pF has been detected with an error of 1% within 100 μs.

关 键 词：Capacitive sensor array flexible sensor tactile sensor micro-needle array bionic robot 

分 类 号：TP242[自动化与计算机技术—检测技术与自动化装置]