基于电子自准直仪的大口径准直波前检测系统  

Measuring system for large-aperture wavefront collimation based on electronic autocollimator

作　　者：徐建程[1] 陈曌[1] 侯园园[1] 

机构地区：[1]浙江师范大学信息光学研究所,浙江金华321004

出　　处：《浙江师范大学学报（自然科学版）》2016年第1期43-47,共5页Journal of Zhejiang Normal University:Natural Sciences

基　　金：国家自然科学青年基金资助项目(61205163);"浙江师范大学创新团队"项目资助

摘　　要：为测量大口径准直波前的准直性,开发了基于电子自准直仪的准直波前检测系统.介绍了大口径准直波前检测原理及检测装置,分析了主要误差源.采用800 mm口径参考面测量系统误差并进行校准,校准后,该系统的精度从0.91″提高到0.36″.用该系统测量610 mm口径相移干涉仪的准直波前,实验结果表明:该干涉仪的准直波前处于发散状态,最大发散角为24.53″.开发的波前准直检测系统能够满足大口径干涉仪准直波前的检测要求.To measure the wavefront collimation of large-aperture interferometer, it was developed a testing system based on electronic autocollimator, which consists of linear rail system, scanning pentaprism and elec-tronic autocollimator.The principle and the system of large-aperture wavefront collimation testing were de-scribed and the main error sources were analyzed.An accurate reference surface with aperture of 800 mm was used to measure the system error of the developed system.The accuracy of the system increased from 0.91″to 0.36″arcsec by calibration of system error.The collimated wavefront of the phase shifting interferometer with aperture of 610 mm was measured by the developed system.The result shows that the maximum divergence an-gle of the collimated wavefront was 24.53″arcsec.The developed system could meet the requirement of colli-mated wavefront test for large-aperture interferometer.

关 键 词：大口径干涉仪 准直波前 电子自准直仪 系统误差 

分 类 号：O436.1[机械工程—光学工程]