基于光场耦合的时栅位移传感器设计  

Design of time-grating displacement sensor based on light field coupling

作　　者：昌驰 朱革[1] 付敏[1] 姜林言[1] 

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《传感器与微系统》2016年第2期113-115,119,共4页Transducer and Microsystem Technologies

基　　金：教育部新世纪优秀人才支持计划资助项目(NCET-13-1065);重庆市教委科学技术研究项目(KJ130801)

摘　　要：为了实现制造成本低、易加工、高精度的位移测量,设计了一种光场耦合式的时栅位移传感器。介绍了利用基于交变光场的两路驻波合成电行波信号,并通过鉴相的方式实现空间位移转换的测量原理;完成了传感器的结构设计,给出了传感器的系统框图,具体分析了信号处理电路的功能。实验结果表明:光场耦合式的时栅位移传感器在108 mm范围内误差为±0.5μm。In order to achieve displacement measurement of low cost,easy processing and high-precision,timegrating displacement sensor of light field coupling is designed. The measurement principle of displacement sensor,which uses electric standing waves based on alternating light field to synthesize electric traveling wave signal,and achieves spatial displacement conversion by means of phase discrimination,is illustrated; structural design of sensor is completed,system block diagram is given and function of signal processing circuit is specifically analyzed. Experimental results show that measurement error of time-grating displacement sensor of light field coupling can reach to ± 0. 5 μm at range of 108 mm.

关 键 词：位移测量 光场耦合 行波合成 时栅传感器 误差曲线 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]