基于主元分析的干涉仪相移器校准方法  

Phase-shifting Calibrating Method Based on Principle Component Analysis in Interferometer

作　　者：徐建程[1] 候园园 陈曌[1] 

机构地区：[1]浙江师范大学信息光学研究所,浙江金华321004

出　　处：《光子学报》2016年第1期75-79,共5页Acta Photonica Sinica

基　　金：国家自然科学青年基金项目(No.61205163);欧盟玛丽居里IIF项目(No.301807)资助~~

摘　　要：利用主元分析从一组干涉图中提取相位和相移量,得到相移量与驱动电压之间的对应关系,从而实现压电陶瓷相移器的非线性校准.模拟结果表明:主元分析法计算相移量的误差随着干涉图中条纹根数的增多而减小;当干涉图中条纹根数多于0.25时,相移量计算误差小于0.1664rad.实验结果表明:相移量计算误差是周期分布,对相移器校准准确度影响小.该方法无需迭代计算,且对干涉图中条纹根数没有严格要求,因此是一种高效且实用的校准方法.By using Principal Component Analysis, the phase and the phase shifts were extracted simultaneously from one set of interferograms, the relationship between the phase shifts and the driving voltages was obtained and then the calibration of nonlinear phase shifts was achieved. Numerical simulations and experiments were implemented to verify the effectiveness of this method. The simulation results show that the calculation error of phase shifts for the method decreases with the increasing of the number of fringes in interferograms. The error is less than 0. 1664rad when the number of fringes is larger than 0.25. The experimental results show that the calculation error of phase shifts is a periodic distribution and has few effect on the accuracy of phase shifter calibration. The proposed method without non-iterative has no strict requirement for the number of fringes in interferograms, thus it is an effective and efficient nonlinear phase-shifting calibrating method for piezoelectric ceramic transducer in interferometer.

关 键 词：干涉测量 条纹分析 主元分析 压电陶瓷相移器 相移技术 

分 类 号：O436.1[机械工程—光学工程]