980nm大功率基横模分布反馈激光器  

980 nm High-Power Fundamental Mode Distributed-Feedback Laser

作　　者：张奇[1] 赵懿昊[1] 董振[1] 王翠鸾[1] 李伟[1] 刘素平[1] 马骁宇[1] 

机构地区：[1]中国科学院半导体研究所光电子器件国家工程中心,北京100083

出　　处：《中国激光》2016年第2期20-26,共7页Chinese Journal of Lasers

摘　　要：980 nm波段的大功率半导体激光器作为抽运源有很重要的应用,但目前该类器件存在光束质量差和谱宽较宽的问题,影响其抽运效率和稳定性。为提高大功率半导体激光器的抽运效率,就要减小其光谱宽度,提升光束质量。而大功率基横模分布反馈激光器(DFB)通过在器件内部引入分布反馈光栅可以实现窄线宽激光的波长稳定输出,并通过优化脊型波导条件来实现基横模模式输出,提升光束质量。测试该器件的光电特性,1000μm腔长器件的阈值电流约为6 m A,斜率效率为0.71 W/A,最大稳定输出功率为130 m W。该激光器的波长随温度漂移系数为0.064 nm/K;对其远场发散角进行测量,得到快轴发散角为34°,慢轴发散角为6.3°。As the pumping source of lasers, 980 nm high-power laser diodes are of great importance. However, these laser diodes have some shortcomings, such as broad spectral width and low beam quality which lower the pumping efficiency and affect the stability of laser diodes. In order to improve the pumping efficiency of high-power semiconductor laser, the linewidth should be narrowed and the beam quality should be increased. The 980 nm high- power distributed-feedback laser （DFB） is studied by fabricating a first order grating into the laser to realize the narrow linewidth, wavelength stability output and optimizing the condition of the ridge waveguide to get the fundamental mode output. The fabricated laser diode with 1000 μm cavity length has a threshold current of 6 mA, slope efficiency of 0.71 W/A, maximum stable output of 130 mW. The thermal drift coefficient of wavelength on this DFB laser is 0.064 nm/K. When measuring the far-field divergence angle, fast axis divergence angle is 34° and slow axis divergence angle is 6.3°.

关 键 词：激光器 大功率分布反馈激光器 基横模 脊型波导 波长稳定 

分 类 号：TN248.4[电子电信—物理电子学]