分子直径法计算相对校正因子在气相色谱法测定三氯氢硅含量中的应用  

Calculation of Relative Correction Factor by Molecular Diameter Method as Applied to GC Determination of Trichlorosilane

作　　者：于晓艳[1] 陶明[1] 左世芳 杨红燕[1] 李亚娜[1] 张永凤[1] 赵建为[1] 

机构地区：[1]昆明冶研新材料股份有限公司云南省光电子硅材料制备技术企业重点实验室,曲靖655000

出　　处：《理化检验（化学分册）》2016年第2期183-186,共4页Physical Testing and Chemical Analysis(Part B:Chemical Analysis)

摘　　要：在气相色谱法测定三氯氢硅含量中,采用分子直径法,以四氯化硅为标准物,计算氯化氢、二氯二氢硅、三氯氢硅在热导检测器上的相对校正因子,并以氦气为载气,测定三氯氢硅对四氯化硅的相对质量校正因子。未采用分子直径法得到的相对质量校正因子为0.891,采用分子直径法得到的相对质量校正因子为0.915,两者相对误差为1.13%。Relative correction factors for hydrogen chloride, dichlorosilane and trichlorosilane used in TCD in GC-determination of trichlorosilane were calculated by molecular diameter method with silico tetrachloride as reference material, and relative mass correction factor for trichlorosilane referring to silicon tetrachloride was determined using helium as carrier gas. Values of relative mass correction factor obtained with and without using the molecular diameter method were 0. 915 and 0. 891 respectively, giving value of relative error of 1.13%.

关 键 词：分子直径法 气相色谱法 三氯氢硅 相对校正因子 

分 类 号：O657.7[理学—分析化学]