High-precision method of detecting motion straightness based on plane mirror interference  

作　　者：邓勇军 张之敬 金鑫 许志尧 孙宏昌 

机构地区：[1]School of Mechanical Engineering,Beijing Institute of Technology

出　　处：《Journal of Beijing Institute of Technology》2015年第4期466-470,共5页北京理工大学学报（英文版）

基　　金：Supported by National Defense Basic Scientific Research Project(A222013);High Quality CNC Machine Tool and Basic Manufacturing Equipment Scientific Major Project(2012ZX04010-061)

摘　　要：A high-precision method of detecting motion straightness was proposed based on the prin- ciple of plane mirror interference after analyzing the motion straightness error of a linear stage. De- tection experiments were carried out and the motion straightness errors were separated by the linear regression method. Finally, linear measurement uncertainty of the detection method was estimated. The results showed that this detection method was simple and accurate, and was especially suitable for precision detection of motion straightness error in the small travel movement of ultra-precision machining.A high-precision method of detecting motion straightness was proposed based on the prin- ciple of plane mirror interference after analyzing the motion straightness error of a linear stage. De- tection experiments were carried out and the motion straightness errors were separated by the linear regression method. Finally, linear measurement uncertainty of the detection method was estimated. The results showed that this detection method was simple and accurate, and was especially suitable for precision detection of motion straightness error in the small travel movement of ultra-precision machining.

关 键 词：motion straightness plane mirror interference UNCERTAINTY HIGH-PRECISION 

分 类 号：TG502[金属学及工艺—金属切削加工及机床]