石英音叉温度频率特性的温度传感器（英文）  

Temperature-frequency characteristics of quartz tuning fork for temperature sensing

作　　者：徐军[1] 刘春花[1] 马静[1] 李欣[2] 

机构地区：[1]哈尔滨理工大学自动化学院,哈尔滨150080 [2]哈尔滨理工大学计算机科学与技术学院,哈尔滨150080

出　　处：《强激光与粒子束》2016年第6期102-107,共6页High Power Laser and Particle Beams

基　　金：supported by National Natural Science Foundation of Heilongjiang Province(F201308and F201136)

摘　　要：提出了一种基于石英晶体温度频率特性的石英音叉微谐振式温度传感器。通过理论分析的方法对传感器进行设计,并采用有限元仿真对传感器的结构参数进行优化。采用光刻和蚀刻微加工技术制造石英音叉谐振器,对石英音叉温度传感器样机的频率温度特性进行实验研究。实验结果表明:石英音叉温度传感器的标准谐振频率为36.545kHz,灵敏度为-1.9Hz/℃,在-20到100℃的温度范围内,其非线性误差小于0.18%,迟滞为0.02%,与理论研究相吻合。该传感器具有高精度、高灵敏度、低功耗和低成本的特点,为高性能温度测量提供较好的解决方案。A quartz tuning fork （QTF） micro resonant temperature sensor which employs the shifting frequency corresponding to temperature is developed for high performance temperature measurement. The sensoris designed by the theoretical analysis, and the finite element simulation is employed to optimize the structureparameters. Micromachining technology is adopted in the fabrication of the QTF resonator using photolithography and etching technology. Performances of the QTF temperature sensor prototypes are experimentally investigated. Experimental results show that the resonance frequency of the QTF temperature sensor is approximately 3%. 545 kHz and the sensitivity is -1.9 Hz/℃ in the operating range of -20 100 ℃, with a nowlinearityless than 0.18% and a hysteresis of 0.02%, which are in good agreement with analytical calculation results.Due to the excellent performances such as high accuracy, high sensitivity, low power and low cost, this QTFtemperature sensor provides a commendable solution for high performance temperature measurement.

关 键 词：石英音叉 温度频率特性 微机械技术 有限元仿真 温度传感器 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]