W-AlN高温太阳光谱选择吸收涂层的结构优化与实验验证  

Structural optimization and experimental verification of W-AlN high temperature solar spectrum selective absorbing coatings

作　　者：张敏[1] 梁卉[1] 张志丹[1] 索妮 李培刚[3] 

机构地区：[1]辽宁师范大学物理与电子技术学院,大连116029 [2]大连理工大学材料科学与工程学院,大连116085 [3]浙江理工大学物理系光电材料与器件中心,杭州310018

出　　处：《中国科学：技术科学》2016年第1期46-53,共8页Scientia Sinica(Technologica)

基　　金：国家自然科学基金(批准号:61274017;51572241);教育部留学回国人员科研启动基金(编号:教外司留2012 940号);辽宁省高等学校优秀人才支持计划(编号:LJQ2011115)资助项目

摘　　要：选取W-AlN金属-介质型选择性吸收涂层为研究对象,用金属W作为红外反射层,W-AlN作为吸收层,AlN作为减反层,利用Mathematica软件对该涂层的金属W体积分数和吸收层、减反层的厚度等参数进行优化计算,优化结果表明:吸收层中金属W的体积分数对涂层的选择吸收性能有直接影响;与高金属吸收层相比,低金属吸收层的厚度对涂层选择吸收性能的影响较显著;低/高金属吸收层中金属W体积分数的最优值分别为0.2/0.8,而最优厚度分别为0.1/0.05mm,此时涂层的吸收率为0.841,发射率为0.021;加入厚度为0.06mm的AlN减反层后,吸收率达到0.920,发射率为0.022;加入厚度适当的减反层可以有效提高涂层的吸收率,同时也会使发射率随之增加;增加减反层和低金属吸收层厚度都会使涂层的反射率骤升阈值波长发生红移.利用磁控溅射方法在抛光的不锈钢表面制备了W/W-AlN/AlN选择吸收涂层,各层膜厚度和吸收层中金属体积分数都严格遵循优化结果,测试所得涂层的反射率曲线、吸收率和发射率均与优化结果符合良好.W-Al N metal-dielectric selective absorbing coatings were studied, in which tungsten thin film acted as the infrared reflective layer, W-Al N as the absorbing layer and Al N as the antireflective layer. The volume fraction of W, the thickness of absorbing layer and antireflective layer were optimized and calculated using Mathematica software. Optimization results show that the volume fraction of W in the absorbing layers exerts a direct influence on the selective absorbing performance of the whole W/W-Al N/Al N coatings; compared with that of the high metal volume fraction absorbing layer, the thickness of low metal volume fraction absorbing layer exerts more apparent influence on the selective absorbing performance of the W/W-Al N/Al N coatings. Optimal volume fractions of W in the low/high metal absorbing layers are 0.2/0.8, and their optimal thickness are 0.1 ？m/0.05 ？m, respectively. The absorptance of the optimized coating is 0.841, the emittance is 0.021. After adding the Al N antireflective layer of 0.06 ？m, the absorptance increases to 0.920 and the emittance is 0.022. An antireflective layer with a appropriate thickness can effectively improve the absorptance of the coating, however, it will also make the emittance increase. The surge threshold wavelength of the reflectance will red-shift as increasing the thickness of antireflective layer and the low metal absorbing layer. The W/W-Al N/Al N selcetive absorbing coating was fabricated on polished stainless steel using magnetron sputtering. The thickness of absorbing layer and antireflective layer, and the W volume fraction were controlled to match the optimized resluts. The reflectance, absorptance and emittance of the as-deposited W/W-Al N/Al N coating agree well with the optimized results.

关 键 词：太阳光谱选择吸收涂层 W-AlN 吸收率 反射率 结构优化 

分 类 号：TG174.4[金属学及工艺—金属表面处理]