Si基双环级联光学谐振腔应变检测研究  

Study on Strain Detection with Si Based on Bicyclic Cascade Optical Microring Resonator

作　　者：唐军[1,2] 雷龙海 张伟[1,2] 张天恩[1,2] 薛晨阳[1,2] 张文栋[1,2] 刘俊[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学电子测试技术国防科技重点实验室,山西太原030051

出　　处：《光谱学与光谱分析》2016年第3期874-879,共6页Spectroscopy and Spectral Analysis

基　　金：国家自然科学基金项目(51225504)资助

摘　　要：绝缘衬底上的硅材料制备的光学微环谐振腔结构具有高灵敏度、结构尺寸小和极低模式体积等特性,被广泛应用到光信息传递、惯性导航领域,但极少被应用到力学信号的测试,为此,研究了一种基于硅基光学微环谐振腔结构的悬臂梁式应力/应变敏感计,利用微环谐振腔环形波导径向形变量作为感应应力的中间物理量,在外界应力作用下,环形波导的半径将发生改变,使结构的光学谐振参数产生变化,从而使光学微环谐振腔谐振谱线发生明显红移,体现出良好的应力/应变敏感特性;通过设计双环级联光学微腔,并采用MEMS光刻、ICP腐蚀工艺制备了嵌入式光学微腔应变计结构,结合理论计算了悬臂梁结构的应力应变敏感特性,经仿真及实验得到,应变计结构的应力/应变灵敏度分别为0.185pm·kPa-1,18.04pm·microstrain-1,与单环微腔结构相比,线性量程增加了近50.3%,应力灵敏度提高了近10.6%,初步验证了嵌入式光学微腔结构进行高灵敏度应力/应变检测的可行性,有望实现新型光学力敏传感器件的微型化、集成化。Optical micro-ring resonator prepared on Silicon-On-Insulator（SOI）has high sensitivity,small size and low mode volume.Its high sensitivity has been widely applied to the optical information transmission and inertial navigation devices field,while it is rarely applied in the testing of Mechanics.This paper presents a cantilever stress/strain gauge with an optical microring resonator.It is proposed the using of radius change of ring waveguide for the sensing element.When external stress is put on the structure,the radius of the SOI ring waveguide will be subjected to variation,which causes the optical resonant parameters to change.This ultimately leads to a red-shift of resonant spectrum,and shows the excellent characteristics of the structure＇s stress/strain sensitivity.Designed a bicyclic cascade embedded optical micro-cavity structure,which was prepared by employing MEMS lithography and ICP etching process.The characteristic of stress/strain sensitivity was calculated theoretically.Two values of 0.185pm·kPa-1 and 18.04pm·microstrain-1 were obtained experimentally,which also was verified by theoretical simulations.Comparing with the single-loop micro-cavity structure,its measuring range and stress sensitivity increased by nearly 50.3%,10.6%,respectively.This paper provides a new method to develop micro-opto-electromechanical system（MOEMS）sensors.

关 键 词：应变检测 光学谐振腔 谐振谱线 绝缘衬底上的硅 

分 类 号：TN815[电子电信—信息与通信工程]