基于时序推延的线阵CCD动态位移测量方法研究  

Dynamic Displacement Measurement Method Research of Linear CCD Based on Timing Delay

作　　者：付敏[1] 朱革[1] 郑方燕[1] 许现波 高宇[1] 昌驰 

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《光学学报》2016年第2期91-100,共10页Acta Optica Sinica

基　　金：国家自然科学基金(51505053;51505052);国家重大科学仪器设备开发专项(2013YQ220893);重庆市基础科学与前沿技术研究专项项目(cstc2015jcyj A1467)

摘　　要：针对传统线阵CCD测量方法仅适用于静态图像采集或低速位移测量的问题,在分析CCD动态测量过程中动态误差产生原因的基础上,提出一种驱动时序互相推延的多个CCD同步测量方法。该方法实现了在一个积分周期内的等时间多个位移值测量,等效于减少单个CCD积分时间,从而提高线阵CCD的动态测量范围。设计了一个由5个线阵CCD沿圆周均布的,时序推延的角位移传感器,并完成相应实验系统的搭建。通过与高精度圆光栅在不同速度下动态误差的检定,得出随着运动速度的提高,时序推延测量方法的动态特性要明显优于传统测量方法。结果表明,时序推延测量法在30 r/min时与传统方法 10 r/min的动态误差水平相当,验证了时序推延测量方法对提高CCD动态特性的可行性。The traditional linear CCD measurement method is only suitable for static image acquisition ordisplacement measurement at low speed. On the basis of the CCD dynamic error analysis in the process of dynamic measurement, a drive timing delay method which is synchronous measured by multiple CCD is proposed. This method uses multiple linear CCD arranged from beginning to end in a space and straggles with each other in time to realize multiple displacement values measurement, so as to improve the dynamic measurement range of linear CCD. To verify the validity of the scheme, a timing delay angular sensor is designed by a circular array which is constituted by five linear CCD sensors of the same tape, and the construction of the corresponding experimental system is completed. By measuring compare with high precision circular grating in the different rotational speeds, with the increase of speed, the timing delay measurement method of dynamic characteristics is obviously superior to the traditional measuring method. The results indicate that the level of dynamic error of the timing delay method in 30 r/min is equal to the traditional method in 10 r/min. It concludes that the feasibility of linear CCD dynamic characteristics improvement is verified with the timing delay measurement method.

关 键 词：测量 线阵CCD 时序推延 动态测量 

分 类 号：O438[机械工程—光学工程]