Fabrication of flexible reduced graphene oxide/Fe2O3 hollow nanospheres based on-chip micro-supercapacitors for integrated photodetecting applications  

作　　者：Shaosong Gu Zheng Lou Ludong Li Zhaojun Chen Xiangdong Ma Guozhen Shen 

机构地区：[1]Department of Material Science and Engineering, China University of Mining & Technology (Beijing), Beijing 100083, China [2]State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083,China [3]College of Chemical Science and Engineering, Qingdao University, Qingdao 266071, China

出　　处：《Nano Research》2016年第2期424-434,共11页纳米研究（英文版）

基　　金：This work was supported by the National Natural Science Foundation （No. 61377033）.

摘　　要：Micro-supercapacitors （MSCs） as important on-chip micropower sources have attracted considerable attention because of their unique and advantageous design for optimized maximum functionality within a minimized sized chip and excellent mechanical flexibility/stability in miniaturized portable electronic device applications. In this work, we report a novel, high-performance flexible integrated on-chip MSC based on hybrid nanostructures of reduced graphene oxide/Fe2O3 hollow nanospheres using a microelectronic photo-lithography technology combined with plasma etching technique. The unique structural design for on-chip MSCs enables high-performance enhancements compared with graphene-only devices, exhibiting high specific capacitances of 11.57 F·cm^-3 at a scan rate of 200 mV·s^-1 and excellent rate capability and robust cycling stability with capacitance retention of 92.08% after 32,000 charge/discharge cycles. Moreover, the on-chip MSCs exhibit superior flexibility and outstanding stability even after repetition of charge/discharge cycles under different bending states. As-fabricated highly flexible on-chip MSCs can be easily integrated with CdS nanowire-based photodetectors to form a highly compacted photodetecting system, exhibiting comparable performance to devices driven by conventional external energy storage units.Micro-supercapacitors （MSCs） as important on-chip micropower sources have attracted considerable attention because of their unique and advantageous design for optimized maximum functionality within a minimized sized chip and excellent mechanical flexibility/stability in miniaturized portable electronic device applications. In this work, we report a novel, high-performance flexible integrated on-chip MSC based on hybrid nanostructures of reduced graphene oxide/Fe2O3 hollow nanospheres using a microelectronic photo-lithography technology combined with plasma etching technique. The unique structural design for on-chip MSCs enables high-performance enhancements compared with graphene-only devices, exhibiting high specific capacitances of 11.57 F·cm^-3 at a scan rate of 200 mV·s^-1 and excellent rate capability and robust cycling stability with capacitance retention of 92.08% after 32,000 charge/discharge cycles. Moreover, the on-chip MSCs exhibit superior flexibility and outstanding stability even after repetition of charge/discharge cycles under different bending states. As-fabricated highly flexible on-chip MSCs can be easily integrated with CdS nanowire-based photodetectors to form a highly compacted photodetecting system, exhibiting comparable performance to devices driven by conventional external energy storage units.

关 键 词：FE2O3 microsupercapacitor PHOTODETECTOR FLEXIBLE 

分 类 号：TN215[电子电信—物理电子学] TM53[电气工程—电器]