SWNT随机网络TFT输出特性的仿真及实验验证  

Simulation and Experimental Verification of the Output Characteristics of the SWNT Random Network TFT

作　　者：王佐奉 王莎[1] 郭奥[2] 胡少坚[2] 忻佩胜[1] 石艳玲[1] 

机构地区：[1]华东师范大学信息科学技术学院,上海200062 [2]上海集成电路研发中心有限公司,上海201210

出　　处：《微纳电子技术》2016年第3期146-150,182,共6页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(61574056);上海市自然科学基金资助项目(14ZR1412000)

摘　　要：为了准确表征单壁碳纳米管(SWNT)随机网络薄膜晶体管(TFT)的输出特性,采用蒙特卡罗方法实现对沟道区域SWNT随机分布情况的仿真,并且通过在弹道输运模型中引入与栅压相关的拟合参数α(Vg)拟合碳管间、碳管与金属电极间接触的影响,最终获得SWNT随机网络TFT输出特性的仿真结果。实验中,以溶液浸泡法制备SWNT薄膜作为TFT沟道材料,以与传统工艺兼容的淀积、刻蚀等步骤制备了TFT,并进行了器件输出特性的测试。实验验证表明,沟道宽度为50μm、长度为10μm TFT的输出特性测试数据与仿真拟合的误差仅为5.6%。此仿真方法能较准确地描写SWNT随机网络TFT的输出特性,通过对蒙特卡罗仿真参数的调整,能预测薄膜晶体管跨导随几何尺寸的变化。In order to accurately characterize the output characteristic of the single-wall carbon nanotubes（SWNT）random network thin-film transistor（TFT）,the simulation of the random distribution of the SWNT in the channel region was realized based on Monte Carlo method,and the fitting of the contact effects between the SWNTs or the SWNT and metal electrode based on the ballistic transport model was achieved through introducing a fitting factorα（Vg）related to the gate voltage.Then the output characteristic simulation result of the SWNT random network TFT was obtained finally.In the experiment,with the SWNT thin film prepared by the solution immersion method as the channel material,the TFT was prepared by the deposition and photolithography compatible with the traditional processes,and the output characteristics of the TFT were tested.The experimental verification indicates that the error of the testing data and simulation result of the output characteristic is 5.6% with the channel width of 50μm and the channel length of 10μm.The simulation method can accurately describe the output characteristic of the SWNT random network TFT,and predict the relationship between the transconductance and device geometry by adjusting the values of Monte Carlo simulation parameters.

关 键 词：薄膜晶体管(TFT) 蒙特卡罗方法 输出特性 随机网络 单壁碳纳米管(SWNT) 

分 类 号：TN321.5[电子电信—物理电子学] TB383[一般工业技术—材料科学与工程]