Co掺杂ZnO纳米结构的合成及其气敏特性  

Synthesis and Gas-Sensing Property of Co-Doped ZnO Nanostructures

作　　者：王文达[1] 高翻琴 刘建霞[1] 

机构地区：[1]太原理工大学信息工程学院,太原030024

出　　处：《微纳电子技术》2016年第3期188-194,共7页Micronanoelectronic Technology

基　　金：山西省自然科学基金资助项目(2013011019-5;2012021030-1);微细加工光学技术国家重点实验室基金资助项目(KFS4);山西省科技重大专项资助项目(20121101004);山西省高等学校特色重点学科建设项目(晋教财[2012]45号)

摘　　要：采用水热法合成了不同质量分数Co掺杂ZnO纳米结构,利用扫描电子显微镜(SEM)、能谱仪(EDS)和X射线衍射仪(XRD)对其表面形貌、元素种类和物相结构进行了分析和表征。制备出了基于不同量Co掺杂的ZnO气体传感器,并研究了Co掺杂ZnO气体传感器对甲烷的气敏特性。实验结果表明,在最佳工作温度(140℃)下,质量分数2%Co掺杂ZnO气体传感器对体积分数为10-4甲烷气体的最高灵敏度可达3.55,最低检测极限为5×10-8,并且响应时间和恢复时间分别为19和27 s。这表明Co掺杂ZnO气体传感器在实现对低浓度甲烷气敏检测方面具有较好的潜在应用价值。The Co-doped ZnO nanostructures with different mass fractions of Co were synthesized using the hydrothermal method.The morphologies,elements and phase of the as-prepared Codoped ZnO nanostructures were characterized by the scanning electron microscopy（SEM）,energy dispersive spectrometer（EDS）and X-ray diffraction（XRD）.The Co-doped ZnO gas sensors with different mass fractions of Co were fabricated,and the gas-sensing performances of the fabricated gas sensors were also studied for the methane gas.The experiment results show that at optimal working temperature（140 ℃）,the highest sensitivity of the Co-doped ZnO gas sensor with the Co doping mass fraction of 2% for the methane gas with the 10-4 volume fraction can reach to 3.55,and the minimum detection limit is 5×10-8.Moreover,the corresponding response time and recovery time are 19 s and 27 s,respectively.The experimental results demonstrate that Co-doped ZnO gas sensors have greatly potential for the application of the low concentration methane detection.

关 键 词：水热法 Co掺杂ZnO 甲烷气体 传感器 气敏特性 灵敏度 

分 类 号：TB383[一般工业技术—材料科学与工程] TP212[自动化与计算机技术—检测技术与自动化装置]