钽-氧化锆光纤黑体腔温度传感器特性参数测试  

Research on Characteristic Parameters of Ta-ZrO_2 Fiber Blackbody Cavity Temperature Sensor

作　　者：郝晓剑[1,2] 桑涛[1,2] 潘保武[3] 周汉昌[1,2] 

机构地区：[1]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051 [2]中北大学电子测试技术重点实验室,山西太原030051 [3]中北大学材料科学与工程学院,山西太原030051

出　　处：《兵工学报》2016年第2期373-378,共6页Acta Armamentarii

基　　金：国家自然科学基金项目(61473267);国防技术基础科研项目(JSJC2013408C009)

摘　　要：为了实现恶劣环境、狭小空间瞬态高温的测量,采用溅射、等离子体喷涂技术研制了蓝宝石光纤钽(熔点为2 997℃)-氧化锆(熔点为2 715℃)薄膜黑体腔瞬态高温传感器。设计了3支水电解的氢氧焰枪组成的恒温高温静态灵敏度标定装置和大功率高频可调制CO2激光脉冲作为阶跃激励源的动态特性标定装置。测试结果表明:当静态灵敏度标定装置恒温区为1 721℃、传感器抗冲击能力达到50 MPa以上时,传感器测得的温度为2 802℃;当CO2激光脉冲作为1 500℃高温阶跃输入信号时,测得该传感器时间常数为微秒数量级。In order to realize the transient high temperature measurement in the harsh environment and narrow space,a sapphire fiber tantalum（ melting point 2 997 ℃）-zirconia（ melting point 2 715 ℃） thin film black body cavity transient high temperature sensor is developed by the sputtering and plasma spraying technology. Constant high temperature static sensitivity calibration device,which is composed of three water electrolysis oxyhydrogen flame guns,and dynamic characteristic calibration device with high power and high frequency modulated CO2 laser pulse as step excitation source are designed. The measured results show that,when the temperature of constant temperature area of the static sensitivity calibration device is 1 721 ℃ and the impact resistance of the sensor is up to above 50 MPa,the temperature measured by the sensor is 2 802 ℃. When the CO2 laser pulse is used as a high temperature step input signal at 1 500 ℃,the time constant measured by the sensor is μs order of magnitude.

关 键 词：仪器仪表技术 钽-氧化锆薄膜 动态特性 瞬态超高温 抗冲击能力 测试 

分 类 号：TP212.11[自动化与计算机技术—检测技术与自动化装置]