基于SOI的SOH电光调制器设计  

Study of a SOH EO Modulator Based on SOI

作　　者：齐影[1] 安俊明[1,2] 王玥[1] 张家顺[1] 王亮亮[1,2] 

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点联合实验室,北京100083 [2]河南仕佳光子科技有限公司,河南鹤壁458030

出　　处：《半导体光电》2016年第1期7-12,共6页Semiconductor Optoelectronics

基　　金：国家自然科学基金项目(61274047);国家自然科学基金重点项目(61435013);国家自然科学青年基金项目(61307034;61205044)

摘　　要：设计了一种基于绝缘层上硅(SOI)的推挽式硅-有机物混合(SOH)马赫-曾德干涉型(MZI)电光调制器。利用薄膜模式匹配法对槽波导(slot)的光场分布进行了仿真分析,优化后得到了限制因子为0.32的slot波导结构。采用推挽式马赫-曾德干涉仪结构,并在相移臂嵌入LX M1非线性有机材料,得到半波电压-长度积V_π·L为0.885V·mm、电学响应带宽f_(RC)可达123.2GHz、开关速度为8.11ps的SOH调制器结构。利用基于本征有限元法求解麦克斯韦方程,对共平面波导电极系统进行了计算仿真,获得了特性阻抗接近50Ω、高频速率匹配的电极结构。A push-pull SOH MZI electro-optic modulator based on SOI was designed.The optical field distribution of slot waveguide was simulated and analyzed using the film mode matching（FMM）solver,and the field confinement factor of the waveguide is obtained as 0.32.Combining the characteristics of the MZI structure and nonlinear polymer material LX-M1 which has large nonlinear coefficient r33,the voltage-length products V_π·Lof 0.885V·mm and the bandwidth of 123.2GHz can be obtained by numerical analysis.A typical coplanar waveguide（CPW）electrode system was designed by solving Maxwell＇s equations explicitly with a finiteelements based eigensolver.The electrode structure with the impedance matching of 50Ωand high-frequency velocity matching was achieved.

关 键 词：SOH 马赫-曾德干涉仪 电光调制器 slot波导 共平面波导行波电极 

分 类 号：TN252[电子电信—物理电子学]