反射镜热畸变对激光光束质量影响的研究  

Influence of mirror thermal deformation on beam quality of laser

作　　者：李艳娜[1] 谢翔云[1] 王刚[1] 唐力铁[1] 

机构地区：[1]西北核技术研究所,陕西西安710024

出　　处：《激光与红外》2016年第3期284-288,共5页Laser & Infrared

摘　　要：基于热传导理论,建立了高斯光束辐照硅反射镜的物理模型,利用多物理场数值分析软件COMSOL Multiphysics求解热传导方程,仿真计算得到镜面表面温度分布曲线以及镜面变形曲线,进一步结合光学仿真软件模拟计算,研究得到Si反射镜镜面的热畸变对输出光束质量的影响。结果表明:随着激光辐照时间的增大,反射镜热变形越显著,输出光束质量β因子越大,但β值的变化首先较快而后趋于平缓。随着辐照激光功率的增加,反射镜热变形越大,输出光束质量β因子不断增大。The physical models of Si mirror under Gauss laser irradiation was built based on heat transfer theory. The temperature field and thermal deformation distributions on the mirror surface were calculated and analyzed by using Comsol Multiphysics software. And then the effect of thermal distortion of Si mirror on output beam quality of high-power laser has also been analyzed combining with simulation software. The results show that Si mirror thermal deformation increases with the increase of the irradiation time,and beam quality factor β increases accordingly,but β increased significantly and then approaches flat with the increase of the irradiation time. Beam quality and mirror thermal deformation also increase with the increase of the laser power.

关 键 词：反射镜 热变形 光束质量 辐照时间 激光功率 

分 类 号：TN248[电子电信—物理电子学]