基于双焦距微透镜的半导体激光束准直的研究  

Beam collimation of laser diode based on double-focus micro-lens

作　　者：廖明星[1] 王翔[1] 简伟明[1] 

机构地区：[1]中国科学技术大学精密机械与精密仪器系,安徽合肥230026

出　　处：《激光与红外》2016年第3期294-299,共6页Laser & Infrared

基　　金：安徽省自然科学基金项目(No.11040606M109)资助

摘　　要：针对半导体激光器光束的准直,从分析光束本征像散的角度出发,给出利用单个双焦距微透镜准直LD光束的方法;理论分析和ZEMAX模拟表明在快慢轴两个方向均为双曲面轮廓的双圆锥曲面透镜能实现对光束快慢轴的同时准直;利用光刻胶热熔融法制作了具有双焦距的椭圆形微透镜,并进行了半导体激光器光束的准直实验,测量光束准直前后的发散角,结果表明双焦距微透镜可以实现准直。Aiming at beam collimation of laser diode,a method that can collimate the LD beam with single double-focus micro-lens is proposed based on the analysis of astigmatism. Theoretical analysis and ZEMAX simulation show that micro-lens with biconic surface can collimate fast and slow axes of the beam at the same time. The elliptical micro-lens with double-focus was manufactured by melting photoresist. Then the experiment of LD beam collimation was carried out,and the beam divergence angles before and after collimation were measured. The results show that doublefocus micro-lens can collimate effectively.

关 键 词：激光技术 光束准直 双焦距微透镜 半导体激光器 

分 类 号：O435[机械工程—光学工程]