基于最小二乘迭代的多波长同时相移干涉测量方法  

Simultaneous Phase-Shifting Multi-Wavelength Interferometry Based on the Least-Squares Iterative Algorithm

作　　者：范金坪[1,2] 徐小飞[2] 吕晓旭[2] 刘胜德[2] 钟丽云[2] 

机构地区：[1]深圳信息职业技术学院电子与通信学院,广东深圳518172 [2]华南师范大学广东省微纳光子功能材料与器件重点实验室,广东广州510006

出　　处：《中国激光》2016年第3期211-220,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金(61078064;61177005;61275015;61475048)

摘　　要：提出一种基于最小二乘迭代的多波长同时相移干涉测量方法。该方法可以在三个波长光波同时入射的同轴相移干涉测量系统中,对所有波长进行同时相移,通过单色CCD采集一系列相移量未知的多波长同时相移干涉条纹图,利用最小二乘迭代算法提取出单个波长下的包裹相位分布。结合多波长光学位相解包和降噪处理得到合成波长的相位分布,进而测量出待测物体的三维形貌。对该方法进行了数值模拟和光学实验验证,结果表明该方法实验过程简便、测量精度高、抗噪能力强。A novel simultaneous phase-shifting multi-wavelength interferometry based on the least-square iterative algorithm is presented. From the in-line phase-shifting interferometry system of three illumination wavelengths, a phase-shifting procedure of all illumination wavelengths can be carried out simultaneously. A sequence of phasesshifting interferograms with unknown phase-shifts at multiple wavelengths have been recorded simultaneously by a monochrome CCD. By using the least-square iterative operation, the wrapped phase at each single wavelength can be retrieved respectively, so the phase of synthetic wavelength can be obtained by multi-wavelength optical phase unwrapping and noise reduction, and then the three-dimensional topography of the measured object is got. The proposed method has been validated by both the numerical simulation and optical experiment, which shows simple optical setup, high measuring accuracy and capacity of anti-noise.

关 键 词：测量 相干光学 干涉术 相位测量 相移技术 多波长相移干涉术 最小二乘迭代算法 

分 类 号：O438.1[机械工程—光学工程]