基于高温制备的氧化钙镁复合薄膜光电特性研究  

Photoelectric properties of calcium and magnesium oxide films based on high reaction temperature

作　　者：韦海成[1] 李海燕[2] 张秀霞[1] 

机构地区：[1]北方民族大学电气信息工程学院,宁夏银川750011 [2]西安交通大学电子物理与器件教育部重点实验室,陕西西安710049

出　　处：《液晶与显示》2016年第3期265-269,共5页Chinese Journal of Liquid Crystals and Displays

基　　金：国家自然科学基金项目(No.61461001;No.51365001);国家自然科学基金前期培养项目(No.2013QZP09);宁夏自然科学基金重点项目(No.NZ13083)~~

摘　　要：采用电子束蒸镀工艺制备氧化钙掺杂氧化镁复合介质保护膜并深入分析了制备温度对该复合保护膜透过率及二次电子发射效率的影响。实验表明,高温制备能够使复合薄膜表面形貌更为致密,结晶粒径增加,薄膜的透过率和发光效率提高。当制备温度为300℃时,复合薄膜的形貌更为致密平整,裕度从25V增加到32V,发光效率从1.70lm/W提高到1.91lm/W,提高了12.35%。The calcium oxide doped magnesium oxide composite dielectric protective film was fabricated by electron beam evaporation.The influence of the fabrication temperature for the secondary electron emission of the composite dielectric protective film is studied.The experimental results show that the film processed by elevated temperature will be more compact,the grain size increases.The luminous efficiency will be improved and the transmittance of the film will be increased.When the processed temperature is 300℃,the formation of the composite film is more dense,the work gas voltage margin raises from 25 Vto 32V,the luminous efficiency increases from 1.70lm/W to 1.91lm/W,which is improved by 12.35%.

关 键 词：氧化镁 介质保护膜 二次电子发射 

分 类 号：TN873.94[电子电信—信息与通信工程] TN27