一种高精度激光吸收率测量装置  

High-precision laser absorption rate measuring device

作　　者：高爱华[1] 王少刚[1] 闫丽荣[1] 

机构地区：[1]西安工业大学光电工程学院,陕西省薄膜技术与光学检测重点实验室,陕西西安710021

出　　处：《应用光学》2016年第2期303-307,共5页Journal of Applied Optics

基　　金：陕西省工业科技攻关项目:(2015GY048);总装基金项目:(9140A18020214BQ52001)

摘　　要：针对现有激光吸收率测量的不足,在总结现有激光吸收率测量方法基础上,设计了一种积分球法激光吸收率测量装置。增加了导光管结构,并对光源进行了监测,对光束进行了调制。采用相关检测和同步采集等方法,有效地去除了背景噪声、探测器及检测电路噪声对测量的影响。并实验比较了安装导光管前后装置对样品吸收率的测量影响,并对多个样品进行实验。结果表明,对于样品反射率在10×10^(-6)~10 000×10^(-6)范围内,装置的测量误差可以达到±2%以内,实现了激光吸收率的高精度测量。Aiming at the deficiency of the existing laser absorption rate measurement,a laser absorbing rate measuring device based on integrating sphere method was designed on the basis of the existing laser absorption rate measurement device.The light tube structure was added,the light source was monitored,and the light beam was modulated.The method of correlation detection and synchronous acquisition was adopted,which could effectively remove the influence on the measurement of background noise,detector noise and detection circuit noise.Furthermore,the influence of the light tube on the sample absorption rate was compared in experiment,and the experiments on multiple samples were carried out.The results show that the measurement error of the device can reach±2% or less for the sample reflectance in the range of 10×10-（-6）-10 000×10-（-6）ppm,which indicates that high-accuracy measurement of laser absorption rate is achieved.

关 键 词：积分球 吸收率 噪声 导光管 

分 类 号：TN247[电子电信—物理电子学]