极高真空测量中微小离子流检测技术研究  

THE STUDY ON DETECTION TECHNOLOGY OF TINY ION CURRENT FOR EXTREMELY HIGH VACUUM MEASUREMENT

作　　者：孙健[1] 李得天[1] 王永军[1] 张虎忠[1] 张琦[1] 

机构地区：[1]兰州空间技术物理研究所,兰州730000

出　　处：《真空与低温》2016年第2期75-80,共6页Vacuum and Cryogenics

基　　金：国家杰出青年科学基金(No.61125101);国家重大科学仪器设备开发专项(No.2013YQ24042108)

摘　　要：为解决极高真空测量中电离真空计微小离子流的检测难题,设计采用精密运算放大器组成电流电压转换结构,配合低通滤波、零点调节以及相位补偿等技术,实现了10^(-14)A微小离子流的准确检测。通过与国内外不同型号电离真空计进行试验测试,验证了该设计电路能够准确检测10^(-9)Pa极高真空下的电离真空计离子流,为实现极高真空测量设备国产化提供了技术参考。In order to detect the extremely low ion current in ionization gauge when it is used to measure extremely high vacuum,a current-to-voltage conversion circuit equipped with low-pass filter,zero-point adjustment and phase com-pensation technology is designed in this paper,which can accurately measure the extremely low ion current about 10-14 A. By verifying present circuit with different gauge type,it is found that the designed circuit can precisely detected the ex-tremely low ion current generated in 10-9 Pa. This circuit provides a technical reference for achieving extremely high vacu-um equipment localization.

关 键 词：极高真空 测量 微小离子流 检测 

分 类 号：TB77[一般工业技术—真空技术]