单晶硅生长用石英坩埚的组成与结构特征  

COMPOSITION AND STRUCTURE OF THE QUARTZ CRUCIBLE FOR MONOCRYSTALLINE GROWTH

作　　者：张大虎[1] 田青越 汪灵[1] 罗大伟[1] 潘俊良[1] 

机构地区：[1]成都理工大学材料与化学化工学院,四川成都610059

出　　处：《矿物岩石》2016年第1期12-16,共5页Mineralogy and Petrology

基　　金：国家自然科学基金项目(41572038);国家公益性行业科研专项经费项目课题(201011005-5);四川省教育厅资助科研项目(16TD0011;15ZA0079)

摘　　要：为了解国产单晶硅生长用石英坩埚的技术现状,为石英坩埚的研究与应用提供科学依据,采用多种现代检测方法,对四川某企业生产的石英坩埚及其高纯石英原料的化学成分、物相和结构特征进行测试分析,结果表明:单晶硅生长用石英坩埚是一种以高纯石英为原料加工制备的石英玻璃功能材料;石英坩埚的透明情况和分层结构均由内部的气泡引起,透明层中气泡较少,直径?=10μm^100μm,不透明层中复合气泡密集且明显大于透明层,直径?=50μm^300μm。该企业所生产的石英坩埚出现双层、透明单层、不透明单层等3种不同横断面结构,但它们的微量杂质元素含量相似(总量为101×10^(-6)~188×10^(-6))、物相相同(非晶态的石英玻璃),其质量还未达到国家质量标准,一个重要原因是所用的高纯石英原料13种微量杂质元素总量为55×10^(-6),属4N中端产品,与美国尤尼明4N8标准级高端产品还存在很大差距。In order to find out the technical situation of domestic quartz crucibles for monocrystalline growth and to provide scientific evidence for the research and application of quartz crucibles,a variety of modern detection methods are used to investigate chemical composition, phase and structural characteristics of the quartz crucible and the high-purity quartz produced by a manufactory in Sichuan,Chiiaa. The result shows that the quartz crucible for monocrystalline growth is a kind of quartz glass function materials made from high-purity quartz. Their transparent situation and hierarchy inside are caused by the internal bubble,fewer bubbles in the transparent layer with the diameter of Ф=10μm-100μm and a lot of composite bubbles in opaque layer with diameter of Ф=50 μm-300μm. There are three different cross-sectional structures in the quartz crucibles, double, single transparent and opaque monolayer, respectively. Their trace impurity elements are similar （a total of 101 × 10^-6 - 188 × 10^ -6 ） and the phase are the same （amorphous silica glass） ,implying that the quality has not yet reached the national quality standards. One of important reason is that the trace impurity elements of the high purity-quartz are 55 × 10^-6 which is 4N product. Compared with UNIMIN U. S. ＇Company＇s 4N8 product,the technology of high-purity quartz is still more backward than international advances.

关 键 词：石英坩埚 石英 高纯石英 石英玻璃 单晶硅 

分 类 号：TB321[一般工业技术—材料科学与工程]