介质阻挡微放电过程的二维粒子模拟计算  

Two-Dimensional PIC Simulation of Dielectric Barrier Microdischarge

作　　者：秦文超[1] 熊路遥 李良[1] 郭颖[1] 周鸿颖[1] 丁可[1] 

机构地区：[1]东华大学理学院,上海201620

出　　处：《东华大学学报（自然科学版）》2016年第1期117-123,130,共8页Journal of Donghua University(Natural Science)

基　　金：国家自然科学基金资助项目(11475043)

摘　　要：针对介质阻挡微放电的空间尺度较小以及较难进行实验诊断,利用二维PIC-MCC(质点网格法-蒙特卡罗碰撞)对其放电过程进行模拟研究,得到放电过程中带电粒子密度、电势与电场的分布,以及离子入射角度和入射能量分布.模拟结果表明:带电粒子的密度分布和放电空间中的电势、电场分布相互影响;介质阻挡微放电过程中出现的条纹现象,来源于放电过程中的粒子密度峰分布,与电势和电场分布密切相关;电极介质层附近的离子入射角度和入射能量分布对研究电极寿命极其重要.For the size is relatively small and experiment diagnostic is difficult to carry on,dielectric barrier microdischarge process is simulated and studied using a two-dimensional PIC-MCC（particle in Cell-Monte Carlo Collision）model.The typical spatial and temporal distribution of plasma parameters in the discharge is known from the simulation,such as charged particle density,potential,electric field,ion incident angle and ion incident energy.Simulation results show that during the discharge,the distribution of charged particles is affected by the potential and electric field distribution.The striation phenomenon comes from the distribution of particle density peaks,and is closely related to potential and electric field.The angle and energy distribution,that ions collide with the dielectric layer around the electrode,plays an important role in studying the life of electrode.

关 键 词：介质阻挡微放电 粒子模拟 等离子体 

分 类 号：O531[理学—等离子体物理]