新型微气体传感器的ANSYS分析与优化  

Analysis and Optimization of ANSYS Applied on Novel Micro Gas Sensor

作　　者：刘丽丽[1] 李守春[1] 王连元[1] 何越[1] 刘丽[1] 王雪松[1] 苏畅[1] 

机构地区：[1]超硬材料国家重点实验室,吉林大学物理学院,吉林长春130012

出　　处：《仪表技术与传感器》2016年第2期15-17,共3页Instrument Technique and Sensor

基　　金：吉林省科技厅重点科技攻关项目(20140204027GX)

摘　　要：设计了一种新型微气体传感器的结构,并利用有限元分析软件ANSYS对该传感器的基底和电极进行了分析与优化。结果得出:传感器的基底设计为硅杯状基座结构,且在Si O_2绝缘层与硅基座之间另加了Si导热层和Si O_2保护层,加热电极宽度和间距分别为50μm和60μm,此时微传感器的中心工作区域可获得高且均匀的温度分布,同时中心区域的磁感应强度值极小,有利于传感器整体性能的提高。A novel structure was designed for micro gas sensor,and the substrate and electrode structures of the micro gas sensor were analyzed and optimized by using finite element analysis tool. The results show that when the substrate of the sensor is designed as silicon cup structure,silicon layer of thermal conductivity and protective layer of Si O_2 being sandwiched between the insulating layer of Si O_2 and silicon pedestal,and the heating electrode width and spacing are 50 μm and 60 μm,the centre area of the sensor can obtain high and uniform temperature distribution,at the same time the minimum magnetic flux density value is found in the center region of the sensor,which is helpful to improve the whole performance of the sensor.

关 键 词：微气体传感器 ANSYS 结构优化 温度分布 磁场分布 

分 类 号：TP212.2[自动化与计算机技术—检测技术与自动化装置]