140 GHz空腔滤波器设计及加工工艺研究  

The Design of Cavity Filter at 140 GHz and Study on Processing Technology

作　　者：甯彪 缪旻[1] 

机构地区：[1]北京信息科技大学信息微系统研究所,北京100101 [2]北京大学微米/纳米加工技术国家级重点实验室,北京100871

出　　处：《电子器件》2016年第1期21-25,共5页Chinese Journal of Electron Devices

基　　金：国家自然科学基金项目(61176102;60976083;60501007);国家重大科技专项基金项目(2009ZX02038);北京市属高等学校人才强教计划项目(PHR201108257);北京市属高等学校高层次人才引进与培养计划项目(长城学者培养计划;CIT&TCD20150320)

摘　　要：设计并实现了一种采用进口电火花技术加工的D波段电感膜片耦合的矩形波导空腔滤波器。采用等效电路法设计了一个140 GHz矩形空腔带通滤波器。采用有限元仿真软件HFSS分析了腔体个数对滤波器主要性能的影响,最终成功设计了一个性能优良的四阶空腔滤波器,中心频率(140±3)GHz,带内插入损耗S21在-3 d B以内,回波损耗S11在-20 d B以下。采用电火花微加工技术成功加工出了四阶滤波器的主体部分,相应完成了结构键合等关键工艺,首次制作了基于电火花技术的D波段矩形波导空腔滤波器。测试结果为中心频率(138.5±3)GHz,带内插入损耗最好达到了-4.4 d B。结果表明滤波器在140GHz具有带通特性和滤波功能,尽管与理论上的-3 d B有差异,但考虑到加工误差、夹具损耗等情况下,样品主要技术指标与设计值较为一致。A rectangular waveguide cavity filter of D band was designed and achieved with inductor diaphragm cou-pling by adopting electric spark micro-machining technology. Using the equivalent circuit method a rectangular cav-ity filter at 140 GHz was designed. The influence of the cavity number on the main performance of the filter was an-alyzed. A four order cavity filter with excellent performance was designed successfully. The center frequency is （140±3）GHz,the insertion loss is within-3 dB,the return loss is below-20 dB. The prototypes were fabricated us-ing electric spark micro-machining technology,the bonding technique was employed for the fabrication of filter. The electric spark micro-machining cavity filter with a center frequency of（138.5±3）GHz,insertion loss of-4.4 dB, the test results showed the filter has the band-pass characteristics and filter function in 140 GHz. In the case of con-sidering the machining error and fixture loss,the main technique indexes basically accord with the design values.

关 键 词：滤波器 空腔 毫米波 太赫兹 全波仿真 电火花微加工 

分 类 号：TN713.5[电子电信—电路与系统]