能量平衡法静电驱动柔性振膜微泵特性分析  

Analysis on Electrostatically Actuated Diaphragm Micropumpwith Energy Equilibrium Method

作　　者：胡院林 梁鑫[1] 王文[1] 张彧[1] 

机构地区：[1]上海交通大学机械与动力工程学院制冷与低温研究所,上海200240

出　　处：《传感技术学报》2016年第1期15-20,共6页Chinese Journal of Sensors and Actuators

基　　金：国家自然科学基金项目(50976067);国家自然科学基金项目(51576123)

摘　　要：从能量平衡的角度建立了静电驱动柔性振膜微泵的平衡方程,基于对压缩过程中振膜动能的考虑,改进了最小能量法压缩模型,结合均匀压力载荷下圆薄膜大挠度形变理论对静电驱动柔性振膜微泵进行理论分析。对振膜与腔体壁面贴合的压缩过程中各能量相互转化的关系进行分析,并与最小能量法模型进行了对比。结果表明,能量平衡法考虑了薄膜振动过程中的动能,故薄膜与腔体具有更大的贴合面积,且以薄膜与腔体完全贴合时作为零应力参考状态降低压缩过程中的薄膜形变势能,计算得到的静电微泵的压缩效率更高,在驱动电压为300 V时,改进的双腔模型中振膜贴合半径为4.06 mm,所得最大压升为87.08 k Pa。基于改进的模型,对双腔微泵压升的影响因素进行讨论,发现降低柔性薄膜厚度会使输出压力有所上升,并且减小腔体表面介电层厚度、减小腔体深度与半径可以有助于提高微泵的压升。The electrostatically actuated flexible diagram pump is analyzed in this paper,it is modeled with the mod-ified energy equilibrium method considering the kinetic energy of the diagram. Energy variation of the pump is alsoanalyzed here. Compared with the results from the minimum energy method,the calculated pressure rise is 87.08 k Pa with actuated voltage 300 V,and the pull-in radius of the diagram on the compression chamber is 4.06 mm,thepressure rise is a few higher than the result with the minimum energy method due to the impact of the kinetic energyof the diagram. With the proposed method,some factors,such as diaphragm thickness,dielectric layer thicknessand cavity geometric parameters are discussed on the performance of the flexible diagram pump with double-cavity.Moreover,reducing the diagram thickness and its dielectric layer,decreasing the cavity depth and radius is helpfulto improve the pressure rise of the micropump.

关 键 词：静电驱动微泵 能量平衡法 柔性薄膜形变 

分 类 号：TH38[机械工程—机械制造及自动化]