膜层厚度对Ag/TiO_2膜透光隔热性能的影响  

Effects of Film Layer Thickness on Transmittance and Thermal Insulation of Ag/TiO_2 Films

作　　者：丁泽良[1] 陈飞龙[1] 黄志翔[1] 杨益辉 

机构地区：[1]湖南工业大学机械工程学院,湖南株洲412007

出　　处：《包装学报》2016年第2期15-19,共5页Packaging Journal

基　　金：湖南省自然科学基金资助项目(2015JJ5019);湖南省研究生科研创新基金资助项目(CX2015B565)

摘　　要：采用磁控溅射工艺制备了玻璃基Ag/TiO_2膜,并研究了膜层厚度对其透光隔热性能的影响。结果表明:当Ag膜厚度由6.7 nm增加到9.5 nm时,红外光的平均透过率由42.06%减小到7.70%,隔热温差由1.9℃增大到5.7℃,而可见光的平均透过率则呈现出先增加后减少的变化趋势,当Ag膜厚度为7.7 nm时,复合膜的可见光平均透过率达最大值,为70.85%;当Ti O_2膜厚度由4.1 nm增加到16.7 nm时,红外光的平均透过率由34.12%增大到38.28%,而可见光的平均透过率与隔热温差均呈现出先增大后减少的变化趋势,当Ti O_2膜厚度为10.4 nm时,复合膜的可见光平均透过率达最大值,为70.85%,而厚度为13.6 nm时,膜的隔热温差达最大值,为5.2℃。The Ag/Ti O_2 film was prepared on glass substrate by magnetron sputtering, and the effects of film layer thickness on transmittance and thermal insulation of Ag/TiO 2 films were studied. Results showed that the average transmittance of infrared light decreased from 42.06% to 7.70% and the temperature difference increased from 1.9 ℃ to 5.7 ℃ with the increase of Ag film＇s thickness from 6.7 nm to 9.5 nm, while the average transmittance of visible light firstly increased and then decreased. The average transmittance of visible light was up to a maximum of 70.85% at the Ag film＇s thickness of7.7 nm. The average transmittance of infrared light increased from 34.12% to 38.28%, while the average transmittance of visible light and the temperature difference firstly increased and then decreased with the increase of TiO 2 film＇s thickness from 4.1 nm to 16.7 nm. The average transmittance of visible light was up to a maximum of 70.85% at the Ti O_2 film＇s thickness of 10.4 nm, and the temperature difference was up to a maximum of 5.2 ℃ at the Ti O_2 film＇s thickness of 13.6 nm.

关 键 词：Ag/TiO2膜 透光率 隔热温差 光学性能 

分 类 号：O484.4[理学—固体物理]