可延展柔性光子/电子集成器件及转印技术  

Stretchable and flexible photonics/electronics devices and transfer printing

作　　者：黄银[1,2] 李海成[1,2] 陈颖[1,2] 蔡世生 张迎超[1,2] 陆炳卫[1,2] 冯雪[1,2] 

机构地区：[1]清华大学航天航空学院,应用力学教育部重点实验室,北京100084 [2]清华大学先进力学与材料中心,北京100084

出　　处：《中国科学：物理学、力学、天文学》2016年第4期56-69,共14页Scientia Sinica Physica,Mechanica & Astronomica

基　　金：国家重点基础研究发展计划(编号:2015CB351900);国家自然科学基金(批准号:11222220,11320101001,11502128);清华大学自主科研项目资助

摘　　要：基于无机半导体材料的光子/电子集成器件,是现代信息系统的重要组成部分和基础支撑.人与信息的交互融合是信息技术的主要发展方向,这种新的信息交互手段对电子集成器件提出了可延展柔性化的需求,以实现物理世界、信息数据和人类社会资源的综合利用.可延展柔性化的集成器件,可突破传统刚性无机集成器件不可变形、无法与人体曲面环境集成的瓶颈,极大拓展了传统半导体器件的物理形态及应用范围,也必将在健康医疗、脑机融合、物联网等领域产生巨大影响.本文对可延展柔性光子/电子集成器件的基本原理和设计方法进行了详细介绍,并以大脑、心脏和皮肤可集成的可延展柔性无机电子集成器件为例展示了其在生物医疗方面的应用价值,然后介绍了可延展柔性光子/电子集成器件的转印制备技术,最后展望了其未来发展方向.Photonics/electronics integrated devices based on high-performance inorganic semiconductor materials serve as one of the most important building blocks of the physical layer of modern information systems. As a main developing direction of modern information technology, the concept of so-called flexible and stretchable integrated photonics/ electronics is proposed to establish the real-time interaction between human body and information and ultimately to promote the comprehensive utilization of resources from the physical world, the information data and the human society. As compared to the conventional rigidly-integrated inorganic devices, the flexible and stretchable integrated photonics/electronics can not only afford to extremely large deformations without reducing their normal performance, but also achieve conformal integration with the complex topography of the tissues and organs of human body. Due to their striking advantages over conventional integrated devices, the flexible and stretchable integrated photonics/ electronics will greatly broaden the application area of conventional integrated devices and thus have a significant impact on many popular fields such as healthcare and monitoring, brain-machine interfaces and internet of things. In this paper, we first explain in detail the fundamental principle and the design method of the flexible and stretchable inorganic integrated photonics/electronics. To illustrate their practical applications in biomedicine, we then introduce several flexible and stretchable inorganic electronic devices integrated with brain, heart or skin in vivo. The techniques of transfer-printing are also reviewed as the key step in fabrications of the flexible and stretchable inorganic integrated photonics/electronics. This paper ends with a positive perspective on the future of flexible and stretchable inorganic integrated photonics/electronics.

关 键 词：可延展柔性 光子/电子集成器件 转印 

分 类 号：TN303[电子电信—物理电子学]