新型离轴反射变焦距光学系统的多视场检测方法  

Novel multiple field of view detection method for the off-axis reflection zoom optical system

作　　者：周继德[1] 常军[1] 牛亚军[1] 谢桂娟[1] 王希[1] 

机构地区：[1]北京理工大学光电学院,北京100081

出　　处：《物理学报》2016年第8期186-192,共7页Acta Physica Sinica

基　　金：国家自然科学基金(批准号:61178041)资助的课题~~

摘　　要：基于对离轴反射变焦距光学系统进行计算机辅助装调研究,需要检测离轴反射变焦距系统各个视场的波像差,除零度视场外,获得包括其他视场的波像差有助于提高计算机辅助装调的准确性,但是目前已有的波像差检测方法往往只能获得系统零度视场的波像差.本文针对这个难题提出了一种检测离轴反射变焦距光学系统各个视场波像差的方法,并应用于离轴三反变焦距光学系统的各视场波像差仿真检测.该方法在传统自准直干涉法的基础上进行改进,关键在于采用变形镜代替扫描的平面镜,并采用夏克-哈特曼波前传感器代替干涉仪,配合精确标定的激光器光源阵列,可以实现对离轴三反变焦距光学系统的多视场波像差同时检测.由理论分析和仿真模拟得出,该系统在视场（0°,3°）,（0°,4.2°）,（0°,5.5°）,（0°,7°）,（0°,9.8°）,（0°,14°）处经过变形镜补偿后的剩余波像差的RMS值分别为0.00039λ,0.00075λ,0.0024λ,0.00017λ,0.00053λ,0.0057λ,分析仿真结果表明此检测方案是可行的,且适用于离轴反射变焦距系统的计算机辅助装调技术的研究.In order to study the computer-aided alignment for the off-axis reflective zoom optical system, the wavefront aberration of the off-axis reflective zoom system across the field of view needs to be detected. Obtaining the wavefront aberration across the field of view could improve the accuracy of the computer-aided alignment for the off-axis reflective zoom optical system. Restricted by the current wavefront aberration detection technology, only the wavefront aberration at a field degree of 0°could be detected. To solve this problem, a new method to detect the wavefront aberration of off-axis reflective zoom system across the field of view is proposed. According to the traditional autocollimation interferometry method, we improve the detection method by substituting the scan of standard plane mirror with the deformable mirror, replacing the interferometer with Shark-Hartmann sensor and employing the accurately calibrated laser source array to realize the wavefront aberration detection at multiple field of view simultaneously. The simulation shows that the residual wavefront aberration root-mean-square values after compensating for the deformation mirror in the following 6 fields of view（0°, 3°）,（0°, 4.2°）,（0°, 5.5°）,（0°, 7°）,（0°, 9.8°）, and（0°, 14°） are 0.00039λ, 0.00075λ,0.00024λ, 0.00017λ, 0.00053λ, and 0.0057λ, respectively. It shows that the detection method we proposed is suitable for the computer-aided alignment technology for the off-axis reflective zoom system.

关 键 词：光学系统波像差检测 计算机辅助装调 夏克-哈特曼波前传感器 离轴反射变焦距系统 

分 类 号：TP391.7[自动化与计算机技术—计算机应用技术] TP212[自动化与计算机技术—计算机科学与技术]