疏水耐环境型SiO_2/TiO_2/SiO_2-TiO_2太阳能宽光谱增透膜的制备及性能研究  

Hydrophobic and Environment-resistant Properties of SiO_2/TiO_2/SiO_2-TiO_2 Multilayer Antireflective Films in Wide Solar Spectra Range

作　　者：檀满林[1] 张礼杰[1,2] 王晓伟[1] 马清[1] 符冬菊[1] 张维丽[1] 李冬霜[1] 陈建军[1] 张化宇[2] 

机构地区：[1]深圳清华大学研究院,深圳518057 [2]哈尔滨工业大学深圳研究生院,深圳518055

出　　处：《无机材料学报》2016年第4期365-371,共7页Journal of Inorganic Materials

基　　金：深圳市科技计划项目(CXZZ20150323160924557);广东省科技计划项目(2014A010106004);国家自然科学基金(51302150)~~

摘　　要：利用TFCcal设计软件构建膜系结构,采用溶胶–凝胶工艺和提拉法在超白玻璃上制备出厚度精确可控的宽光谱、高增透型SiO2/TiO2/SiO2-TiO2减反膜,同时结合甲基三乙氧基硅烷（MTES）改性碱催化的SiO2溶胶,通过提拉法一次制备出高透过率疏水型薄膜。研究表明,高增透型三层宽光谱减反膜的理论膜层厚度依次为：80.9 nm（内层SiO2-TiO2）、125.0 nm（中间层TiO2）、95.5 nm（外层SiO2）,其在400～700 nm可见光范围内平均透过率实际可高达97.03%以上。多层膜经过退火处理后,膜面的水接触角高达131.5°,同时陈化两个月以后的多层膜透过率仅下降0.143%,表明制备的SiO2/TiO2/SiO2-TiO2多层减反膜具有优良的疏水和耐环境性能。In the help of coatings optimization design using TFCcal program, wide spectrum antireflective SiO2/ TiO2/SiO2-TiO2 multilayer films with thickness precisely controlled were prepared on low iron glass using sol gel process and Czochralski method. The thickness of above layers were separately set as 80.9 nm（SiO2-TiO2, inner layer）, 125.0 nm（TiO2, inter-layer） and 95.5 nm（SiO2, outer layer） according to the results of calculation. A high transmission and highly hydrophobic film was prepared by Czochralski method combined with methyl triethoxysilane（MTES） SiO2 modified base-catalyzed sol. The average optical transmittance could reach 97.03% in the wavelength range of 400–700 nm. After annealing treatment, the surface water contact angles were almost around 131.5°. Furthermore, the optical transmittance only reduced 0.143% after aging for two months, showing that the prepared SiO2/TiO2/SiO2-TiO2 multilayer antireflective films had excellent hydrophobic and environment resistant properties.

关 键 词：增透膜 疏水型 耐环境 宽光谱 

分 类 号：TB321[一般工业技术—材料科学与工程]