恒组分提拉单晶炉的设计与研究  

Design and Study of Constant Components Czochralski Crystal Grower

作　　者：何晔[1] 武欢[1] 王旭光[1] 母江东[1] 邓力[1] 宋晓佳[1] 

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2016年第2期186-188,共3页Piezoelectrics & Acoustooptics

摘　　要：晶体生长过程中由于溶质"分凝现象"的存在,会造成生长出来的晶体沿轴向不均匀分布,从而制约了大尺寸、超长、高均匀性晶体的生长。因此,该文设计了晶体自动生长控制系统和料棒自动补充控制系统,以保证晶体生长液面的高度不变,以及棒料添加组分与晶体组分一致,从而克服晶体生长过程中"分凝现象"的影响,也为晶体生长界面形状的稳定性控制奠定了可靠的基础。In the process of crystal growth,as a result of the existence of solute segregation phenomenon,it will cause the grown crystal to distribute unevenly along the axial,so as to restrict the large size,long,high uniformity of crystal growth.Aiming at the problem,we design the automatic growth control system and the crystal bar automatic control system to ensure that the liquid crystal growth constant height remains unchanged and the bar add components and crystal components are the same.Not only overcome the segregation phenomenon in the process of crystal growth,but also laid the reliable foundation for the stability of the crystal growth interface shape.

关 键 词：恒组分 晶体生长 分凝 自动控制 

分 类 号：TN304.053[电子电信—物理电子学]