毫米波腔体滤波器谐振腔平整度误差研究  

The Research on the Resonant Cavity Flatness Error of Millimeter Wave Cavity Filter

作　　者：南雪莉[1] 张斌珍[1] 赵龙[1] 徐苏坪 

机构地区：[1]中北大学电子测试技术重点实验室,山西太原030051

出　　处：《压电与声光》2016年第2期341-344,共4页Piezoelectrics & Acoustooptics

基　　金：国家自然基金资助项目(51475438);国家自然基金资助项目(61401405)

摘　　要：平整度误差引起的寄生量变化对毫米波滤波器的自谐振频率及品质因数有重大影响,为获得低插损、高品质因数的滤波器结构,针对滤波器制作中存在的平整度误差,该文开展了一系列的研究。通过对基于SU-8胶的毫米波腔体滤波器电铸工艺实验的反复探索,制定出一套能减小毫米波滤波器谐振腔平整度误差的最优电铸方案,即利用脉冲小电流进行电铸。实验结果表明,利用50mA小电流密度电铸能快速获得平整致密高质量的滤波器谐振腔,其铸层表面平整度误差小于2μm;制作精度高,且能实现快速制作。可见,小电流脉冲电铸得到的铸层平整、致密,可有效减小毫米波滤波器的寄生效应,提高系统的精度及灵敏度。The parasitic volume change caused by the flatness error has a significant influence on the self-resonant frequency and quality factor of millimeter wave filter.In order to obtain filter structure with low insertion loss and high quality factor,the article has carried out a series of studies on the copper electroforming technology of millimeter wave cavity filter based on SU-8in terms of flatness error occurred in the manufacture process of the filter.A set of optimized electroforming solutions were put forward through using a small current pulse electroforming able to decrease unflatness of resonant cavity of millimeter wave cavity filter;The experiment results showed that the use of50 mA low current density electroforming can achieve rapid production of filter resonant cavity with high-quality and smooth dense,the surface flatness error of electroformed cast layer is less than 2μm;The low current pulse electroforming can be used to produce the cast layer with smooth dense,thus can reduce the parasitic effect effectively and improve the accuracy and sensitivity of millimeter filters.

关 键 词：毫米波腔体滤波器 谐振腔平整度 电铸铜 脉冲电铸 小电流 

分 类 号：TN385[电子电信—物理电子学] TQ153[化学工程—电化学工业]