基于TDLAS的激光湿度检测技术研究  

Research on Laser Humidity Detection Technology Based on TDLAS

作　　者：张可可[1] 闫星魁[1] 郑学勇 吕富良[3] 陈世哲[1] 赵强[1] 

机构地区：[1]山东省海洋环境监测技术重点实验室,山东省科学院海洋仪器仪表研究所,山东青岛266001 [2]青岛卡诺光谱科技有限公司,山东青岛266042 [3]国家海洋局北海预报中心,山东青岛266061

出　　处：《光电子技术》2016年第1期23-27,共5页Optoelectronic Technology

基　　金：国家自然科学基金(61405106);山东省自然科学基金(ZR2013DM013);山东省科学院青年基金项目(2013QN028,2014QN029)

摘　　要：提出一种利用波长调制与谐波检测技术测量环境湿度的新方法。利用可调谐二极管激光光谱吸收技术,选择948nm波段的H2O分子吸收谱线作为特征谱,并采用反射式开放气室,研制了光路系统结构简单、易于调节的新型湿度传感器样机。实验结果表明,该激光湿度传感器响应频率为40Hz,湿度测量误差在±1.2%以内,能够满足对湿度高动态、高精度测量的需要。A new method to measure the environmental humidity with wavelength modulation technology and harmonic detection technology was proposed based on tunable diode laser absorption spectroscopy.H2 O molecular absorption spectra of 948 nm band were selected as the characteristic spectra,and reflective open gas cell was used.The new humidity sensor prototype was developed,and the structure of the optical system was simple and easy to be adjusted.Experimental results show that the response frequency of the laser humidity sensor is 40 Hz and humidity measurement error is within ±1.2%,which can meet the requirements of humidity measurement with high dynamic and high precision.

关 键 词：传感器 湿度 可调谐二极管激光吸收光谱 波长调制 

分 类 号：TN247[电子电信—物理电子学]