镜面面形误差统计方法研究  

Research of Statistical Methods for Mirror Surface Figure Error

作　　者：周平伟[1] 马宏财[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033

出　　处：《激光与光电子学进展》2016年第4期110-117,共8页Laser & Optoelectronics Progress

摘　　要：光学镜面的变形包括刚体位移和面形误差(表面畸变),分析刚体位移和面形误差对于评价光机系统的环境适应性、空间位置稳定性和成像质量具有重要作用。根据坐标转换法去除镜面变形中的刚体位移,论述了曲面拟合、法线方向和光轴方向三种面形误差统计方法的原理并进行了深入比较,针对不同重力及温度工况计算了镜面面形误差的均方根(RMS)值及峰谷(PV)值。引入镜面弥散斑RMS半径并将其作为面形误差大小的光学评价标准,通过三次插值算法生成栅格矢高面,在ZEMAX软件中建立了高精度的镜面面形误差光学模型,最后采用面形误差的RMS值及PV值与弥散斑RMS半径之间的线性关系考查了三种面形误差统计方法的光学性能。研究结果表明:曲面拟合法统计的面形误差信息不完整,适用于镜面面形方程参数不发生明显改变的工况。法线方向和光轴方向两种统计方法统计的面形误差信息完整,可以全面地衡量光机系统的成像质量。The deformation of optical mirror surface includes rigid-body motion and surface error（distortion）.Analyzing the distortion and rigid-body errors plays an important role while evaluating the imaging quality, the environmental adaptability and spatial positional stability of the opto-mechanical system. Removal of rigid-body errors is based on the coordinate transformation method. Three methods are described to perform the calculation of root mean square（RMS） value and peak valley（PV） value of distortion. The optical model in ZEMAX software is established through grid sag surface by cubic interpolation algorithm. The RMS spot radius calculated in ZEMAX software is used as the optical standard of mirror distortion. The linearity between RMS value and PV value of distortion and RMS spot radius is taken as the evaluation criteria of the optical performance of three statistical methods for mirror distortion. The results show that the information of distortion calculated by surface fitting method is not complete, the surface fitting method can be applied only when parameters of the surface equation have not been significantly changed. However, the information calculated by normal direction and optical axis direction methods is complete which can be used to measure the image quality of optical system comprehensively.

关 键 词：测量 面形误差 刚体位移 均方根半径 栅格矢高面 光机集成分析 

分 类 号：O435[机械工程—光学工程]